Based on nanofocusing refractive x-ray lenses a hard x-ray scanning microscope is currently being developed and is being implemented at beamline ID13 of the European Synchrotron Radiation Facility (Grenoble, France). It can be operated in transmission, fluorescence, and diffraction mode. Tomographic scanning allows one to determine the inner structure of a specimen. In this device, a monochromatic (E=21keV) hard x-ray nanobeam with a lateral extension of 47×55nm2 was generated. Further reduction of the beam size to below 20 nm is targeted.

Parabolic refractive x-ray lenses with short focal distance can generate intensive hard x-ray microbeams with lateral extensions in the 100 nm range even at a short distance from a synchrotron radiation source. We have fabricated planar parabolic lenses made of silicon that have a focal distance in the range of a few millimeters at hard x-ray energies. In a crossed geometry, two lenses were used to generate a microbeam with a lateral size of 380 nm by 210 nm at 25 keV in a distance of 42 m from the synchrotron radiation source. Using diamond as the lens material, microbeams with a lateral size down to 20 nm and below are conceivable in the energy range from 10 to 100 keV.

Parabolic refractive x-ray lenses are novel optical components for the hard x-ray range from about 5 keV to about 120 keV. They are compact, robust, and easy to align and to operate. They can be used like glass lenses are used for visible light, the main difference being that the numerical aperture is much smaller than 1 (of the order of 10−4–10−3). They have been developed at Aachen University and are made of beryllium, boron, aluminium and silicon. Their main applications are in micro- and nanofocusing, in imaging by absorption and phase contrast. In combination with tomography they allow for three-dimensional imaging of opaque media with sub-micrometre resolution. Finally, they can be used in speckle spectroscopy by means of coherent x-ray scattering. References to a number of applications are given.

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Parabolic refractive x-ray lenses with short focal distance can generate intensive hard x-ray microbeams with lateral extensions in the 100 nm range even at a short distance from a synchrotron radiation source. We have fabricated planar parabolic lenses made of silicon that have a focal distance in the range of a few millimeters at hard x-ray energies. In a crossed geometry, two lenses were used to generate a microbeam with a lateral size of 380 nm by 210 nm at 25 keV in a distance of 42 m from the synchrotron radiation source. Using diamond as the lens material, microbeams with a lateral size down to 20 nm and below are conceivable in the energy range from 10 to 100 keV.

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The authors describe an improved production route for silicon nanofocusing lenses for hard x rays using e-beam lithography and deep reactive ion etching. As compared to previous prototypes, these optics have a significantly improved from fidelity, reducing spherical aberrations. Close to an ideal performance for the focusing of hard x rays is achieved with these optics, reaching a lateral beam size of about 50nm. The lens profile is checked by scanning electron microscopy.