Based on nanofocusing refractive x-ray lenses a hard x-ray scanning microscope is currently being developed and is being implemented at beamline ID13 of the European Synchrotron Radiation Facility (Grenoble, France). It can be operated in transmission, fluorescence, and diffraction mode. Tomographic scanning allows one to determine the inner structure of a specimen. In this device, a monochromatic (E=21keV) hard x-ray nanobeam with a lateral extension of 47×55nm2 was generated. Further reduction of the beam size to below 20 nm is targeted.

We have carried out a ptychographic scanning coherent diffraction imaging experiment on a test object in order to characterize the hard x-ray nanobeam in a scanning x-ray microscope. In addition to a high resolution image of the test object, a detailed quantitative picture of the complex wave field in the nanofocus is obtained with high spatial resolution and dynamic range. Both are the result of high statistics due to the large number of diffraction patterns. The method yields a complete description of the focus, is robust against inaccuracies in sample positioning, and requires no particular shape or prior knowledge of the test object.

The emergence of hard X-ray free electron lasers (XFELs) enables new insights into many fields of science. These new sources provide short, highly intense, and coherent X-ray pulses. In a variety of scientific applications these pulses need to be strongly focused. In this article, we demonstrate focusing of hard X-ray FEL pulses to 125 nm using refractive x-ray optics. For a quantitative analysis of most experiments, the wave field or at least the intensity distribution illuminating the sample is needed. We report on the full characterization of a nanofocused XFEL beam by ptychographic imaging, giving access to the complex wave field in the nanofocus. From these data, we obtain the full caustic of the beam, identify the aberrations of the optic, and determine the wave field for individual pulses. This information is for example crucial for high-resolution imaging, creating matter in extreme conditions, and nonlinear x-ray optics.

Coherent x-ray diffraction imaging is an x-ray microscopy technique with the potential of reaching spatial resolutions well beyond the diffraction limits of x-ray microscopes based on optics. However, the available coherent dose at modern x-ray sources is limited, setting practical bounds on the spatial resolution of the technique. By focusing the available coherent flux onto the sample, the spatial resolution can be improved for radiation-hard specimens. A small gold particle (size <100 nm) was illuminated with a hard x-ray nanobeam (E=15.25 keV, beam dimensions approximately 100 x 100 nm2) and is reconstructed from its coherent diffraction pattern. A resolution of about 5 nm is achieved in 600 s exposure time.

Abstract.The hard x-ray scanning microscope at beamline P06 of PETRA III at DESY in Hamburg serves a large user community, from physics, chemistry, and nanotechnology to the bio-medical, materials, environmental, and geosciences. It has been in user operation since 2012, and is mainly based on nanofocusing refractive x-ray lenses. Using refractive optics, nearly gaussian-limited nanobeams in the range from 50 to 100 nm can be generated in the hard x-ray energy range from 8 to 30 keV. The degree of coherence can be traded off against the flux in the nanobeam by a two-stage focusing scheme. We give a brief overview on published results from this instrument and describe its most important components and parameters.