2010
DOI: 10.1063/1.3332591
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Hard x-ray nanobeam characterization by coherent diffraction microscopy

Abstract: We have carried out a ptychographic scanning coherent diffraction imaging experiment on a test object in order to characterize the hard x-ray nanobeam in a scanning x-ray microscope. In addition to a high resolution image of the test object, a detailed quantitative picture of the complex wave field in the nanofocus is obtained with high spatial resolution and dynamic range. Both are the result of high statistics due to the large number of diffraction patterns. The method yields a complete description of the fo… Show more

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Cited by 178 publications
(137 citation statements)
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“…A key requirement is that the illuminated areas overlap substantially, so that iterative algorithms [1][2][3] can successfully reconstruct an image of the specimen, retrieving the amplitude and phase of both the complex sample transmission function and the illuminating probe. At X-ray wavelengths, ptychography has been used to characterize the focusing properties of X-ray optics [4][5][6] , to image interconnects within microchips 7 and to image yeast cells 8 . X-ray ptychography has recently been demonstrated using soft X-rays 9,10 , and has been used with polarized illumination to generate dichroic image contrast from magnetic thin films 11 .…”
mentioning
confidence: 99%
“…A key requirement is that the illuminated areas overlap substantially, so that iterative algorithms [1][2][3] can successfully reconstruct an image of the specimen, retrieving the amplitude and phase of both the complex sample transmission function and the illuminating probe. At X-ray wavelengths, ptychography has been used to characterize the focusing properties of X-ray optics [4][5][6] , to image interconnects within microchips 7 and to image yeast cells 8 . X-ray ptychography has recently been demonstrated using soft X-rays 9,10 , and has been used with polarized illumination to generate dichroic image contrast from magnetic thin films 11 .…”
mentioning
confidence: 99%
“…The reconstruction of the probe can thus be used to analyse the complex eld of the focus [160,265,287].…”
Section: Methodsmentioning
confidence: 99%
“…More recent ptychographic studies investigate the maximum derivable information from ptychographic data under non-simple experimental conditions for the illuminating wave-eld or the object such as position uncertainties [20,110,182], partial coherence and multiple wavelenghts [15,44,78,299], multiple object planes [181,284] and undersampling of the recorded di racted intensities [71]. In the rst place, however, the probably most important result has been the understanding that the ptychographic method not only is able to solve for the encoded object information but also for the illuminating wave-eld [183,294,296] making ptychography a valuable tool for analysing the wave-elds of X-rays [134,144,159,160,265,268]. In principle, the decoupling of object and illuminating wave-eld makes the retrieved object information free of aberrations.…”
Section: Ptychographymentioning
confidence: 99%
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