PtSi Schottky-barrier (SB) FPAs have been developed for ground-based thermal imaging and spaceborne remote sensing applications, making the best possible use of its process compatibility with Si LSIs. The FPAs for mid wavelength infrared (MWIR: 3 -5 jim) thermal imaging are large format 2-D arrays with several array sizes up to 1040x1040. An original readout architecture called the Charge Sweep Device (CSD) has contributed to enhancing their sensitivities, and our stateof-the-art technology has reached a level which realizes FPAs with NETDs of the order of 30 mK. Extending the SB FPA technology to the short wavelength infrared (SWIR: 1 -3 jim) spectral region has made it possible to exploit spaceborne remote sensing applications. The space-grade performance and reliability have been demonstrated with a 4096 element and 2100 element linear FPAs.
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