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A multi-channel free-space micro-optical module for dense MCM-level optical interconnections has been designed and fabricated. Extensive modeling proves that the module is scalable with a potential for multi-Tb/s.cm 2 aggregate bit rate capacity while alignment and fabrication tolerances are compatible with present-day mass replication techniques. The micro-optical module is an assembly of refractive lensletarrays and a high-quality micro-prism. Both components are prototyped using deep lithography with protons and are monolithically integrated using vacuum casting replication technique. The resulting 16-channel high optical-grade plastic module shows optical transfer efficiencies of 46% and interchannel cross talks as low as-22 dB, sufficient to establish workable multi-channel MCM-level interconnections. This micro-optical module was used in a feasibility demonstrator to establish intra-chip optical interconnections on a 0.6µm CMOS opto-electronic field programmable gate array. This opto-electronic chip combines fully functional digital logic, driver and receiver circuitry and flip-chipped VCSEL and detector arrays. With this test-vehicle multi-channel on-chip data-communication has been achieved for the first time to our knowledge. The bit rate per channel was limited to 10Mb/s because of the limited speed of the chip tester.

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In conventional multichannel imaging systems, all channels have similar imaging properties [field-of-view (FOV) and angular resolution]. In our approach, channels are designed to have different imaging properties which add multiresolution capability to the system. We have experimentally demonstrated, for the first time to our knowledge, a three-channel imaging system which simultaneously captures multiple images having different magnifications and FOVs on an image sensor. Each channel consists of four aspherical lens surfaces fabricated from four PMMA plates by ultraprecision diamond tooling and of a baffle made from a titanium (Ti) and aluminum (Al) based metal alloy. The integrated imaging system is able to record a FOV of 7.6° with the first channel and 73° with the third channel while having a magnification ratio of about 6 between them. The experimental and simulation results, specifically the FOV and magnification ratios, are comparable, and this paves a way for low-cost, compact imaging systems which can embed smart imaging functionalities.

In this paper, we present an electrically controllable microoptical component for light beam steering and light intensity distribution built on the combination of nematic liquid crystal (LC) and polymer microprisms. Polymer microprism arrays are fabricated using soft embossing with elastic polydimethylsiloxane molds and ultraviolet curable resins. Surface profiling measurements show that the dimensions of the replicated prisms closely approximate those of the master prism. Two different LC alignment techniques were employed: hybrid rubbing alignment and obliquely evaporated SiO 2 alignment, both of which result in proper alignment of the LC molecules along the prism groove direction. The operation voltage of the LC components is relatively low (10 V rms ). The steering angle of a green laser beam was experimentally studied as a function of applied voltage, and a steering range of 3 was found. The active LC components also effectively deflect a collimated white light beam over a steering angle of about 2 with an efficiency of 27%-33%. All the optical measurements are in agreement with theoretical calculations based on Snell's law.

We present a microfluidic chip in Polymethyl methacrylate (PMMA) for optical trapping of particles in an 80µm wide microchannel using two counterpropagating single-mode beams. The trapping fibers are separated from the sample fluid by 70µm thick polymer walls. We calculate the optical forces that act on particles flowing in the microchannel using wave optics in combination with non-sequential ray-tracing and further mathematical processing. Our results are compared with a theoretical model and the Mie theory. We use a novel fabrication process that consists of a premilling step and ultraprecision diamond tooling for the manufacturing of the molds and double-sided hot embossing for replication, resulting in a robust microfluidic chip for optical trapping. In a proof-of-concept demonstration, we show the trapping capabilities of the hot embossed chip by trapping spherical beads with a diameter of 6µm, 8µm and 10µm and use the power spectrum analysis of the trapped particle displacements to characterize the trap strength.

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