Deep proton writing: a rapid prototyping polymer micro-fabrication tool for micro-optical modules

Erps, Jürgen Van; Vervaeke, Michael; Volckaerts, Bart; Ottevaere, Heidi; Gómez, Virginia; Vynck, Pedro; Desmet, Lieven; Krajewski, Rafal; Ishii, Y.; Hermanne, Alex; Thienpont, Hugo

doi:10.1088/1367-2630/8/11/270

Cited by 40 publications

(32 citation statements)

References 33 publications

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“…This is due to the proton scattering during the interaction with the PMMA. 15 We can conclude that the developed DPW surfaces have a very high quality: almost flat and with a very low RMS surface roughness. However, the ultimate quality assessment of the fabricated out-of-plane coupler is the experimental measurement of the coupling efficiency that can be achieved, which will be discussed in the next section.…”

Section: Fabrication Through Deep Proton Writingmentioning

confidence: 68%

“…15 It consists of a patterned 8.3-MeV proton irradiation of 500-µm thick polymer photoresist (PMMA), followed by a selective etching process to remove the exposed zones. The sample is moved according to a predefined pattern in steps of 500-nm with an accuracy of 50-nm, while depositing 2.4 × 10 4 /µm 2 protons per step to achieve the highest quality optical surfaces.…”

Section: Fabrication Through Deep Proton Writingmentioning

confidence: 99%

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Enhanced pluggable out-of-plane coupling components for printed circuit board-level optical interconnections

et al. 2008

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We present an enhanced out-of-plane coupling component for Printed Circuit Board-level optical interconnections. Rather than using a standard 45• micro-mirror to turn the light path over 90• , we introduce a curvature in the mirror profile and incorporate an extra cylindrical micro-lens for beam collimation. Both modifications enable an increase in coupling efficiency and are extensively investigated using non-sequential ray tracing simulations in combination with Matlab optimization algorithms. The resulting design is fabricated using Deep Proton Writing and experimental characterization of the geometrical properties and measured coupling efficiencies are presented.

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Section: Fabrication Through Deep Proton Writingmentioning

confidence: 68%

Section: Fabrication Through Deep Proton Writingmentioning

confidence: 99%

Enhanced pluggable out-of-plane coupling components for printed circuit board-level optical interconnections

et al. 2008

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“…We have averaged at least five measurements of an area of m m taken at randomly chosen positions. The peak-to-valley flatness of DPW surfaces is measured to be as small as 2.2 m over the total component thickness of 500 m. This is due to the proton scattering during the interaction with the PMMA [11]. We can conclude that the developed DPW surfaces have a very high quality: almost vertical and with a very low rms surface roughness.…”

Section: B Characterization Of the Fabricated Componentsmentioning

confidence: 80%

“…For the manufacturing of the discrete out-of-plane coupling components, we use the rapid prototyping technology of DPW [11]. It consists of a patterned 8.3-MeV proton irradiation of a polymer photoresist (PMMA), followed by a selective etching process to remove the exposed zones.…”

Section: A Fabrication Through Deep Proton Writing (Dpw)mentioning

confidence: 99%

Discrete Out-of-Plane Coupling Components for Printed Circuit Board-Level Optical Interconnections

Erps

Hendrickx

Daele

et al. 2007

IEEE Photon. Technol. Lett.

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Abstract-We propose discrete out-of-plane coupling components as a versatile alternative to current approaches used to couple light in and out of the propagation plane in waveguide-based printed circuit board (PCB)-level optical interconnections. The out-of-plane couplers feature a 45 micromirror and are fabricated using deep proton writing as a rapid prototyping technology. Their fabrication is compatible with replication techniques and shows all the potential of low-cost mass fabrication. In a first configuration, we use the component in a fiber-to-fiber coupling scheme. Coupling losses as small as 0.77 dB were achieved. In a second configuration, the out-of-plane coupler is plugged into a laser ablated cavity in optical waveguides integrated on a PCB. Here a total link loss between out-of-plane fiber and in-plane fiber of 3.00 dB was achieved when using it at the transmitter side and 5.69 dB when using it at the receiver side.

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“…22 DPW consists of a patterned 8.3-M eV proton irradiation of 500-µm thick polymer photoresist (PMMA), followed by a selective etching process to remove the exposed zones. The sample is moved according to a predefined pattern in steps of 500-nm with an accuracy of 50-nm, while depositing 2.5 × 10 4 /µm 2 protons per step to achieve the highest quality optical surfaces.…”

Section: Micro-mirror Insert Fabrication and Embedding Into The Opticmentioning

confidence: 99%

Design and fabrication of embedded micro-mirror inserts for out-of-plane coupling in PCB-level optical interconnections

et al. 2010

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Optical interconnections have gained interest over the last years, and several approaches have been presented for the integration of optics to the printed circuit board (PCB)-level. The use of a polymer optical waveguide layer appears to be the prevailing solution to route optical signals on the PCB. The most difficult issue is the efficient out-of-plane coupling of light between surface-normal optoelectronic devices (lasers and photodetectors) and PCB-integrated waveguides. The most common approach consists of using 45• reflecting micro-mirrors. The micro-mirror performance significantly affects the total insertion loss of the optical interconnect system, and hence has a crucial role on the system's bit error rate (BER) characteristics. Several technologies have been proposed for the fabrication of 45• reflector micro-mirrors directly into waveguides. Alternatively, it is possible to make use of discrete coupling components which have to be inserted into cavities formed in the PCB-integrated waveguides. In this paper, we present a hybrid approach where we try to combine the advantages of integrated and discrete coupling mirrors, i.e. low coupling loss and maintenance of the planararity of the top surface of the optical layer, allowing the lamination of additional layers or the mounting of optoelectronic devices.The micro-mirror inserts are designed through non-sequential ray tracing simulations, including a tolerance analysis, and subsequently prototyped with Deep Proton Writing (DPW). The DPW prototypes are compatible with mass fabrication at low cost in a wide variety of high-tech plastics. The DPW micro-mirror insert is metallized and inserted in a laser ablated cavity in the optical layer and in a next step covered with cladding material. Surface roughness measurements confirm the excellent quality of the mirror facet. An average mirror loss of 0.35-dB was measured in a receiver scheme, which is the most stringent configuration. Finally, the configuration is robust, since the mirror is embedded and thus protected from environmental contamination, like dust or moisture adsorption, which makes them interesting candidates for out-of-plane coupling in high-end boards.

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Deep proton writing: a rapid prototyping polymer micro-fabrication tool for micro-optical modules

Cited by 40 publications

References 33 publications

Enhanced pluggable out-of-plane coupling components for printed circuit board-level optical interconnections

Enhanced pluggable out-of-plane coupling components for printed circuit board-level optical interconnections

Discrete Out-of-Plane Coupling Components for Printed Circuit Board-Level Optical Interconnections

Design and fabrication of embedded micro-mirror inserts for out-of-plane coupling in PCB-level optical interconnections

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