A study was made of the structure and magnetic properties of Fe-Co alloy films produced by dc magnetron sputtering at an oblique angle of incidence. The films obtained in this manner showed uniaxial magnetic anisotropy in the film plane, with an easy axis of magnetization perpendicular to the incident direction of the sputtered particles. The anisotropy field increased with increasing sputtering gas pressure and with increasing Co content at high pressures. The structure of the film surfaces also changed with sputtering Ar gas pressure, and elongated grains were observed in the intermediate Ar pressure range. The texture was essentially isotropic in the film plane over the whole pressure range. It is suggested that the observed uniaxial anisotropy was due mainly to a magnetoelastic effect.
Fe-Zr-Co/FeZr-Co-N soft magnetic multilayered films were alternately prepared by Fe-Zr-Co alloy sputtering and electron cyclotron resonance plasma nitridation, and their magnetic properties and thermal stability were investigated. Co addition to Fe-Zr/Fe-Zr-N multilayered films was effective in improving the magnetic properties of these films. The soft magnetic properties of these films demonstrated outstanding thermal stability, and it was observed that the hyperflne field Hi,, increased up to that for pure Fe-Co alloy by heat treatment. Under the optimum preparation conditions, values for saturation flux density B, of 2.02-2.06 T, coercivity H, of 75-90 A/m, and relative permeability ,u'> 3100 (at 20 MHz) were obtained in Fes4Zr&!os/Fes4Zr&08-N and Fe76ZrsCo1dFe,6Zr&016N multilayered films after annealing at 873 K for 3.6 ks.
Fe-ColFe-CO-N multilayered films were prepared by an alternation of RF-sputtering and electron cyclotron resonance (ECR) plasma nitridation, and the structure and magnetic properties of each were investigated. N2 ECR plasma exposure generated nitride ( E or [ nitride) phases with low saturation flux density on the sputtered Fe-Co layers' surface. In these multilayered films, fine crystal grains and an expansion of the bcc lattice parameter were observed. At the optimum preparation conditions, Fe97.2C02.8/Fe97.2C02,,-N multilayered films demonstrated a high saturation flux density of Bs = 2.0 T, low coercivity of Hc = 120 A/m and relative permeability of p' > 2200 at 20 MHz, respectively.
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