Fe-Zr-Co/FeZr-Co-N soft magnetic multilayered films were alternately prepared by Fe-Zr-Co alloy sputtering and electron cyclotron resonance plasma nitridation, and their magnetic properties and thermal stability were investigated. Co addition to Fe-Zr/Fe-Zr-N multilayered films was effective in improving the magnetic properties of these films. The soft magnetic properties of these films demonstrated outstanding thermal stability, and it was observed that the hyperflne field Hi,, increased up to that for pure Fe-Co alloy by heat treatment. Under the optimum preparation conditions, values for saturation flux density B, of 2.02-2.06 T, coercivity H, of 75-90 A/m, and relative permeability ,u'> 3100 (at 20 MHz) were obtained in Fes4Zr&!os/Fes4Zr&08-N and Fe76ZrsCo1dFe,6Zr&016N multilayered films after annealing at 873 K for 3.6 ks.
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