1993
DOI: 10.1063/1.354299
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Texture, microstructure, and magnetic properties of Fe-Co alloy films formed by sputtering at an oblique angle of incidence

Abstract: A study was made of the structure and magnetic properties of Fe-Co alloy films produced by dc magnetron sputtering at an oblique angle of incidence. The films obtained in this manner showed uniaxial magnetic anisotropy in the film plane, with an easy axis of magnetization perpendicular to the incident direction of the sputtered particles. The anisotropy field increased with increasing sputtering gas pressure and with increasing Co content at high pressures. The structure of the film surfaces also changed with … Show more

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Cited by 37 publications
(10 citation statements)
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“…Oe at 300 K. The origin of such anisotropy in evaporated magnetic layers is usually attributed to anisotropic grains growth or to magnetoelastic effect. 11 We point out that this uniaxial anisotropy has been observed here for amorphous and polycrystalline alloys; it has also been observed for a pure epitaxial metal. 12…”
Section: Magnetic Properties Of "Co 65 Fe 35 … 50 Gd 50 and Co 65 Fe supporting
confidence: 79%
“…Oe at 300 K. The origin of such anisotropy in evaporated magnetic layers is usually attributed to anisotropic grains growth or to magnetoelastic effect. 11 We point out that this uniaxial anisotropy has been observed here for amorphous and polycrystalline alloys; it has also been observed for a pure epitaxial metal. 12…”
Section: Magnetic Properties Of "Co 65 Fe 35 … 50 Gd 50 and Co 65 Fe supporting
confidence: 79%
“…It would be of great scientific as well as technological interests to make this alloy soft while keeping its high saturation magnetization at the same time. However, the extremely high saturation magnetostriction in the Fe-Co alloys, being about 40 ~ 65 × 10 -6 in the composition range of 30 ~ 40 at% of cobalt, makes it very difficult to achieve low coercivity or in-plane uniaxial anisotropy [8][9][10].…”
Section: Introductionmentioning
confidence: 99%
“…Small peaks in H c and M * r seen around 50 • are likely due to stray fields within the sputtering chamber arising from the magnets within the sputtering guns. It is most likely that the uniaxial anisotropy arises from the off-normal angle of incidence of the sputtered atoms relative to the substrate [29,30].…”
Section: A In-plane Magnetometrymentioning
confidence: 99%