The structural and optical properties of β-FeSi2 precipitates in Si have been analyzed. Float zone Si samples were implanted at 250 °C with 350 keV Fe ions to fluences in the range 1–5×1015/cm2 and annealed in vacuum at 800 °C for times up to 24 h. Detailed morphological analyses of these samples, using transmission electron microscopy, reveal the presence of (i) a band of small (with a diameter <30 nm) highly strained β-FeSi2 precipitates centered at a depth of ∼150 nm, (ii) a band of large (>100 nm diameter) fully relaxed β-FeSi2 precipitates centered at a depth of ∼320 nm, and (iii) residual extended defects. A sharp photoluminescence peak at 1.54 μm is measured at 17 K. This peak remains unchanged when the region containing the small precipitates is removed, using Ar sputtering. On the other hand, it is also fully suppressed when the large precipitates region is removed and a high concentration of extended defects remains in the samples. This allowed us to identify the large unstrained precipitates as the main sources of the 1.54 μm luminescence. Finally, we found that carrier recombination within iron precipitates is characterized by a weak oscillator strength resulting in a long decay lifetime of the 1.54 μm signal at 17 K (∼60 μs) and in a strong temperature quenching of the luminescence yield.
Explosive crystallization is a well known phenomenon occurring due to the thermodynamic instability of strongly under-cooled liquids, which is particularly relevant in pulsed laser annealing processes of amorphous semiconductor materials due to the globally exothermic amorphous-toliquid-to-crystal transition pathway. In spite of the assessed understanding of this phenomenon, quantitative predictions of the material kinetics promoted by explosive crystallization are hardly achieved due to the lack of a consistent model able to simulate the concurrent kinetics of the amorphous-liquid and liquid-crystal interfaces. Here, we propose a multi-well phase-field model specifically suited for the simulation of explosive crystallization induced by pulsed laser irradiation in the nanosecond time scale. The numerical implementation of the model is robust despite the discontinuous jumps of the interface speed induced by the phenomenon. The predictive potential of the simulations is demonstrated by means of comparisons of the modelling predictions with experimental data in terms of in situ reflectivity measurements and ex-situ micro-structural and chemical characterization.
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