2000
DOI: 10.1063/1.125693
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Origin and perspectives of the 1.54 μm luminescence from ion-beam-synthesized β-FeSi2 precipitates in Si

Abstract: The structural and optical properties of β-FeSi2 precipitates in Si have been analyzed. Float zone Si samples were implanted at 250 °C with 350 keV Fe ions to fluences in the range 1–5×1015/cm2 and annealed in vacuum at 800 °C for times up to 24 h. Detailed morphological analyses of these samples, using transmission electron microscopy, reveal the presence of (i) a band of small (with a diameter <30 nm) highly strained β-FeSi2 precipitates centered at a depth of ∼150 nm, (ii) a band of large (>10… Show more

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Cited by 78 publications
(36 citation statements)
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“…Emission at 1.54 pm has been reported from the beta phase o f FeSi2 (p-FeSi2) [32,33,34]. Again, the above emission was observed at low temperatures (^ 80 K) and was very weak at room temperature.…”
Section: Resultsmentioning
confidence: 76%
See 1 more Smart Citation
“…Emission at 1.54 pm has been reported from the beta phase o f FeSi2 (p-FeSi2) [32,33,34]. Again, the above emission was observed at low temperatures (^ 80 K) and was very weak at room temperature.…”
Section: Resultsmentioning
confidence: 76%
“…Another evidence for the origin o f the 1.54 pm luminescence from p-FeSi2 has been reported by C. Spinella et al, [34]. Iron was implanted into n-type silicon wafers at 350 keV and 250 °C, at fluences ranging between 1-5 x 10^^ ions/cm"^, followed by amiealing at 800 for up to 24 hours.…”
Section: Iron Disilicidementioning
confidence: 99%
“…Paraskevopoulos). region at 77 K compared to the continuous ␤-FeSi 2 layers or ␤-FeSi 2 single crystals [13,14]. Several methods, such as solid phase epitaxy (SPE) [15], reactive deposition epitaxy (RDE) [16,17] and Fe ion implantation [6,18] have been used to grow ␤-FeSi 2 nanoislands on Si substrates.…”
Section: Introductionmentioning
confidence: 99%
“…47 As with Er-doped Si LEDs (forward biased), the quantum efficiency is probably insufficient (Ͻ0.01% at room temperature) for general applications, owing to high nonradiative recombination at room temperature in these defect systems. 48,49 …”
Section: Depletion Layer Impuritiesmentioning
confidence: 98%