Pick-and-place of micro/nano sized objects means handling of very tiny and very different in properties objects having specific behavior. Besides formal requirements of assembly processes, the tools for controllable manipulation with these objects should not affect the examined micro/nano environment, i.e. should be "small and passive" in any sense. Despite of the recent progress, most available micro-grippers are still suffering of high voltage power supply required, short lifetime, low detection sensitivity and high price. Prototypes of a newly designed micro-gripper, having advantages over the existing analogues, have been developed, experimentally studied, and presented in this paper. The envisaged microgripper is of normally-closed type with thermo-mechanically driven actuator and piezoresistive arm-displacement feedback. The thermo actuator is placed between gripper's arms and consists of double-folded highly-doped compliant silicon beam. As low average voltage vs. arm displacement value as 1V/μm, was experimentally measured.
This paper presents an investigation and development of mechatronic handling devices (MHD) based on a structured piezo ceramic with (3, 1)-piezoelectric effect for manipulation and processing of micro/nano operations. Following the synthesis of kinematic structure for micro-and nano-manipulation tasks based on structured piezo ceramics and closed kinematic structures, a specific multilayer design of piezo actuated MHD for micro-and nano-operations was developed. The MHD was mathematically modelled and a FEmodel was created and simulated with the program system ANSYS. Comparison study of the MHD prototypes was performed using obtained experimental results. An experimental set up was created that aimed to verify the mathematical and simulation models measuring system behaviour like force, displacement and stiffness.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.