Micro/Nano-Manipulators With Structured Piezo Ceramic Actuators

Abstract

This paper presents an investigation and development of mechatronic handling devices (MHD) based on a structured piezo ceramic with (3, 1)-piezoelectric effect for manipulation and processing of micro/nano operations. Following the synthesis of kinematic structure for micro-and nano-manipulation tasks based on structured piezo ceramics and closed kinematic structures, a specific multilayer design of piezo actuated MHD for micro-and nano-operations was developed. The MHD was mathematically modelled and a FEmodel was created and simulated with the program system ANSYS. Comparison study of the MHD prototypes was performed using obtained experimental results. An experimental set up was created that aimed to verify the mathematical and simulation models measuring system behaviour like force, displacement and stiffness.