Low Voltage Thermo-mechanically Driven Monolithic Microgripper with Piezoresistive Feedback

Stavrov, Vladimir; Tomerov, E.; Hardalov, Chavdar; Danchev, Daniel M; Kostadinov, K.; Stavreva, Galina; Apostolov, Evstati; Shulev, Assen; Andonova, Anna; Al-Wahab, M. A.

doi:10.1007/978-3-642-11598-1_24

Cited by 5 publications

(2 citation statements)

References 3 publications

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“…The forward movement of the shaft opens the gripper by rotation of the arms. Several studies demonstrated structures fabricated from nickel [69], silicon [73], polymer [74], and also a normally-open microgripper structure [75]. Other examples can use complex compliant structures to operate the gripper arms.…”

Section: V-shape Chevron Actuatorsmentioning

confidence: 99%

Review of Electrothermal Actuators and Applications

2019

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This paper presents a review of electrothermal micro-actuators and applications. Electrothermal micro-actuators have been a significant research interest over the last two decades, and many different designs and applications have been investigated. The electrothermal actuation method offers several advantages when compared with the other types of actuation approaches based on electrostatic and piezoelectric principles. The electrothermal method offers flexibility in the choice of materials, low-cost fabrication, and large displacement capabilities. The three main configurations of electrothermal actuators are discussed: hot-and-cold-arm, chevron, and bimorph types as well as a few other unconventional actuation approaches. Within each type, trends are outlined from the basic concept and design modifications to applications which have been investigated in order to enhance the performance or to overcome the limitations of the previous designs. It provides a grasp of the actuation methodology, design, and fabrication, and the related performance and applications in cell manipulation, micro assembly, and mechanical testing of nanomaterials, Radio Frequency (RF) switches, and optical Micro-Electro-Mechanical Systems (MEMS).

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Section: V-shape Chevron Actuatorsmentioning

confidence: 99%

Review of Electrothermal Actuators and Applications

2019

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“…A few of the most frequently used principles are, for example, electro thermal (Volland et al 2007;Stavrov 2010, Colinjivadi et al 2008Solano and Wood 2007;Zeman et al 2006;Voicu et al 2007) electrostatic (Beyeler et al 2007;Wierzbicki et al 2006), piezoelectric (Nah and Zhong 2007;Perez et al 2006), electromagnetic (Kim et al 2005) or are based on the shape memory effect (Zhong and Chan 2007). All these techniques have their specific advantages and disadvantages, e.g.…”

Section: Introductionmentioning

confidence: 97%

Characterization of an electro-thermal micro gripper and tip sharpening using FIB technique

et al. 2010

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A micromachined electro-thermal gripper, first introduced by Ivanova et al. (Microelectron Eng 83:1393-1395, represents a promising candidate for the manipulation and handling of micro or even nano-scaled objects. To further optimize the performance of the device, a detailed electrical and mechanical characterization is needed. Due to the so-called duo-action gripper approach (i.e., a separate actuator for closing and opening action) these investigations focused on the maximum (minimum) opening width being 11.5 lm (3.3 lm), while in rest position a value of 4 lm is feasible. The maximum, electrical input power is limited to 80 mW/actuator element, resulting in a current density of up to 1.27 MA cm -2 in the corresponding metal layers. When applying, however, larger current densities the probability of device failure increases substantially as in combination with an enhanced temperature of about 200°C electromigration effects occur in the metallization. Furthermore, the cut-off frequency and parasitic effects during actuation such as the z-deflection and the increase in length of each arm both showing values of up to 3 lm have been investigated as a function of operation parameters. Finally, the tips of the gripper were sharpened using Focused Ion Beam technique to a radius of less than 1 lm for gripping operations in space-restricted environments or for the manipulation or handling of sub-lm scaled objects.

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