Carbon nitride films with the composition ratio CR(C/N)=0.5–3.0 were prepared by the ion and vapor deposition method, where carbon was evaporated on various substrates while being simultaneously bombarded with 0.5–10.0 keV nitrogen ions. The properties of the films were studied by x-ray photoelectron spectroscopy (XPS), Fourier transform infrared spectrometry (FT-IR), ultraviolet transmission spectroscopy, x-ray diffraction, and hardness measurements. The films formed at energies lower than 0.8 keV and CR(C/N)=0.6–0.7 on tungsten carbide showed the highest Knoop harness of 6400 kgf/mm2 on films with 1 μm thickness and a maximum optical band gap of 2.7 eV. X-ray diffraction measurements demonstrated that all films have an amorphous structure. The XPS and FT-IR studies indicated that the peak newly observed at 286.3 eV in the C-1s1/2 XPS spectra arises from triple bonding C≡N.

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A novel inductively-coupled RF plasma source with internal low-inductance antenna (LIA) units was developed to synthesize microcrystalline silicon (mc-Si) film on a large glass substrate. A film thickness profile on a 600 Â 720 mm 2 glass substrate was achieved with high plasma uniformity and a variation of less than AE5% without a standing-wave effect. Raman and transmission electron microscope (TEM) analysis revealed that highly crystallized mc-Si films, which were directly deposited on a glass substrate, were synthesized without an amorphous-phase incubation layer at the substrate interface. A bottom-gate thin-film transistor (BG-TFT) was fabricated employing an optimized mc-Si layer and exhibited a field-effect mobility of 3 cm 2 /(VÁs), which is one order higher than that of a typical amorphous silicon TFT.

Thin zirconium oxide films, formed on Si(111) substrate by ion-beam assisted deposition, have been investigated by x-ray diffractometry with respect to the microstructure of the films, such as preferred orientation, interplanar spacing, crystallite size. The results of the interplanar spacing and diffraction intensity analysis could be interpreted in terms of relative amount of Zr4+ ions estimated by analyses of Zr 3d x-ray photoelectron spectroscopy spectra for the films.

The aim of this study is to detect the spatial current dispersion that appears in the T-wave of patients with congenital long-QT syndrome (LQTS). To observe this dispersion, magnetocardiograms (MCGs)--which have a high spatial resolution--of LQT1 patients (n = 7), LQT2 patients (n = 9) and a control group (n = 33) were recorded. The dispersion was evaluated by plotting current-arrow maps (CAMs) calculated from the MCG signals. In the case of LQT1, abnormal current arrows in the CAMs appeared above the inferior part of the heart in two LQT1 patients with a long corrected QT interval (QTc) (>0.6), and the current direction was from the left (origin side) to the right ventricular muscle (110 degrees). In six out of nine LQT2 patients, abnormal current arrows with angles below 20 degrees were observed above the right inferior part or lower septum; the current direction was from the right (origin side) to the left ventricular muscle. However, in the case of the LQT2 patients, the QTc values did not correlate with the abnormal current. These findings suggest that the origin of abnormal repolarization in LQT1 is the left ventricular muscle and the origin of that in LQT2 is the right ventricular muscle or lower septum. The estimation of the origin in LQTS patients can provide important information such as the risk factor of sudden death.

Recent trends of liquid crystal display (LCD) fabrication toward a significant enlargement of glass substrates require large-area plasma sources with a scale length exceeding 1 m. To meet this requirement, large-area plasma sources with internal low-inductance antenna (LIA) units have been developed for uniform processes, in which design principles for selecting antenna size and configurations in the multiple installation of the LIA units are established. In this study, the effects of antenna size were examined in terms of plasma production characteristics indicating small increase in plasma density with a decrease in antenna size (or antenna impedance). Furthermore, plasma density distributions with the LIA units were investigated to understand the nature of plasma diffusion, which can be utilized for designing plasma profiles with multiple LIA units. First, it was shown that the plasma density distributions followed exponential decay as a function of distance from the antenna. Secondly, the measured plasma density profiles with multiple LIA units were shown to agree well with those obtained by superposing those described by exponential functions, which can be utilized for prediction.

The MCG standard space-time parameters determined here provide a normal range for MCG parameters.