X-ray photoelectron spectroscopy analysis of zirconium nitride-like films prepared on Si(100) substrates by ion beam assisted deposition

Matsuoka, Makoto; Isotani, Sadao; Sucasaire, W.; Kuratani, Naoto; Ogata, Kiyoshi

doi:10.1016/j.surfcoat.2007.11.019

Cited by 72 publications

(40 citation statements)

References 37 publications

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“…Two peaks of Zr 3d spectra correspond to the Zr 3d5/2 and Zr 3d3/2 with the spinorbit splitting of 2.4 eV. 20 The doublet Zr 3d peaks of deposited zirconium oxide thin films were observed at 181.2 and 183.6 eV caused by bonding with oxygen. 21 In Figure 4 (b), the O 1s peak for O-Si (531.7 eV) of zirconium oxide thin film coated on Si was dramatically decreased while that for O-Zr (529.6 eV) was increased.…”

Section: Resultsmentioning

confidence: 98%

The Properties of RF Sputtered Zirconium Oxide Thin Films at Different Plasma Gas Ratio

Park¹,

Heo²,

Kang³

2010

Bulletin of the Korean Chemical Society

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Zirconium oxide thin films deposited on the p-type Si(100) substrates by radio-frequency (RF) reactive magnetron sputtering with different plasma gas ratios have been studied by using spectroscopic ellipsometry (SE), atomic force microscopy (AFM), X-ray diffraction (XRD), and X-ray photoelectron spectroscopy (XPS). The deposition of the films was monitored by the oxygen gas ratio which has been increased from 0 to 80%. We found that the thickness and roughness of the zirconium oxide thin films are relatively constant. The XRD revealed that the deposited thin films have polycrystalline phases, Zr(101) and monoclinic ZrO2 (131). The XPS result showed that the oxidation states of zirconium suboxides were changed to zirconia form with increasing O2 gas ratio.

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Section: Resultsmentioning

confidence: 98%

The Properties of RF Sputtered Zirconium Oxide Thin Films at Different Plasma Gas Ratio

Park¹,

Heo²,

Kang³

2010

Bulletin of the Korean Chemical Society

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“…35-0753). In Figure 1b, Zr 3d spectrum show fitted peaks at 179.1 and 181.5 eV, which correspond to Zr 3d5/2 and Zr 3d3/2 components of the ZrN [27], respectively. Additionally, two peaks located at 182.2 and 184.6 eV, which belong to ZrO2, can be noticed as well.…”

Section: Resultsmentioning

confidence: 98%

Plastic Deformation Induced by Nanoindentation Test Applied on ZrN/Si3N4 Multilayer Coatings

Zhong

Liu

et al. 2017

Coatings

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ZrN/Si 3 N 4 multilayer coating that alternates with either nanocrystalline ZrN or amorphous Si 3 N 4 interlayers was fabricated by reactively magnetron sputtering in an Ar-N 2 mixture atmosphere. The thicknesses of the nanocrystalline ZrN and the amorphous Si 3 N 4 interlayers are~12.5 and 2.5 nm, respectively. The ZrN/Si 3 N 4 coating exhibits a promoted hardness of 28.6 ± 1.2 GPa when compared to the binary ZrN. Microstructure evolution just underneath the nanoindentation impression of the ZrN/Si 3 N 4 multilayer coating has been investigated. The result indicates that both ZrN nanograin rotations and plastic flow of the Si 3 N 4 interlayers contribute to the permanent deformation of the multilayer coating induced by the nanoindentation. In addition, the introduction of the a-Si 3 N 4 interlayers hinders both the initiation and propagation of microcracks when the multilayer coating was applied to the scratch test. The propagation deflection of the microcracks was observed attributed to the heterogenous interface, which produces the hardness promotion of the multilayer coating eventually.

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“…The ion beam assisted deposition (IBAD) technique [14] was used to prepare thin boron films on copper substrates. The IBAD apparatus used consists of a Kaufman-type ion gun and an electronbeam evaporator, adapted to a vacuum chamber.…”

Section: Boron Deposition and Ion Beam Analysismentioning

confidence: 99%

Characterization of multilayer Thick-GEM geometries as ¹⁰B converters aiming thermal neutron detection

et al. 2018

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Abstract. Boron-based thermal neutron detectors have recently regained some attention from the instrumentation community as a strong alternative to helium-3 detectors. From the existing concepts exploiting boron layers in position sensitive detectors, the Cascade [1] is the one that takes full advantage of the 2D capabilities of gaseous detectors, with the position resolution not limited by the architecture of the detector. In this work, a proposal for the Cascade detector, based on Thick-GEMs is presented, together with some preliminary studies of the suitable pitch that optimizes the neutron conversion efficiency, while keeping the collection efficiency intact. The characterization of Thick-GEM prototypes produced in Brazil with hole pitch from 0.75 to 3 mm shows that these devices already present a stable performance at low gains, also resulting in fair energy resolution, when cascaded with a standard Kapton TM 50 µm GEM. Results of the first attempts of boron film depositions with Ion Beam Assisted Deposition and characterization by Ion Beam Analysis are also presented.

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X-ray photoelectron spectroscopy analysis of zirconium nitride-like films prepared on Si(100) substrates by ion beam assisted deposition

Cited by 72 publications

References 37 publications

The Properties of RF Sputtered Zirconium Oxide Thin Films at Different Plasma Gas Ratio

The Properties of RF Sputtered Zirconium Oxide Thin Films at Different Plasma Gas Ratio

Plastic Deformation Induced by Nanoindentation Test Applied on ZrN/Si3N4 Multilayer Coatings

Characterization of multilayer Thick-GEM geometries as ¹⁰B converters aiming thermal neutron detection

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X-ray photoelectron spectroscopy analysis of zirconium nitride-like films prepared on Si(100) substrates by ion beam assisted deposition

Cited by 72 publications

References 37 publications

The Properties of RF Sputtered Zirconium Oxide Thin Films at Different Plasma Gas Ratio

The Properties of RF Sputtered Zirconium Oxide Thin Films at Different Plasma Gas Ratio

Plastic Deformation Induced by Nanoindentation Test Applied on ZrN/Si3N4 Multilayer Coatings

Characterization of multilayer Thick-GEM geometries as 10B converters aiming thermal neutron detection

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Characterization of multilayer Thick-GEM geometries as ¹⁰B converters aiming thermal neutron detection