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Photoconducting sensors are fabricated using radiation-hard diamond films to measure the intensity of vacuum ultraviolet (VUV) radiation. They are composed of a pair of interdigitated Pt electrodes on highly oriented diamond surfaces. The sensors are examined as monitors of the intensity of VUV radiation (λ=172 nm) from xenon excimer lamps with an output power of greater than 10 mW/cm2. It was demonstrated that the diamond sensors have practical durability: the output signals from the sensors are reproducible and stable under a continuous irradiation from the xenon lamps for more than 500 h.

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