Durable ultraviolet sensors using highly oriented diamond films

Hayashi, Kazushi; Tachibana, Takeshi; Kawakami, Nobuyuki; Yokota, Yoshihiro; Kobashi, Koji; Ishihara, Hideaki; Uchida, Kôji; Nippashi, Kenji; Matsuoka, Mikihiko

doi:10.1016/j.diamond.2005.11.042

Cited by 13 publications

(13 citation statements)

References 21 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…It is considered as being solar insensitive and durable to intense VUV radiation with high reliability. This makes it suitable for applications in laser power monitors, for ultraviolet radiation detection in the next generation photolithography, for x-ray source detection as in medical dosimeters and in the high-resolution image sensors used in space exploration [102,103]. As a result of its high radiation hardness and stability when exposed to high-density radiation, diamond diode-based sensors have also been developed to detect particles in high-energy particle experiments [104,105].…”

Section: Piezoresistive and Other Sensorsmentioning

confidence: 99%

Diamond and diamond-like carbon MEMS

Luo¹,

Fu²,

Le³

et al. 2007

J. Micromech. Microeng.

189

View full text Add to dashboard Cite

Diamond and diamond-like carbon (DLC) thin films possess a number of unique and attractive material properties that are unattainable from Si and other materials. These include high values of Young's modulus, hardness, tensile strength and high thermal conductivity, low thermal expansion coefficient combined with low coefficients of friction and good wear resistance. As a consequence, they are finding increasing applications in micro-electro-mechanical systems (MEMS). This paper reviews these distinctive material properties from an engineering design point of view and highlights the applications of diamond and DLC materials in various MEMS devices. Applications of diamond and DLC films in MEMS are in two categories: surface coatings and structural materials. Thin diamond and DLC layers have been used as coatings mainly to improve the wear and friction of micro-components and to reduce stiction between microstructures and their substrates. The high values of the elastic modulus of diamond and DLC have been exploited in the design of high frequency resonators and comb-drives for communication and sensing applications. Chemically modified surfaces and structures of diamond and DLC films have both been utilized as sensor materials for sensing traces of gases, to detect bio-molecules for biological research and disease diagnosis.

show abstract

Section: Piezoresistive and Other Sensorsmentioning

confidence: 99%

Diamond and diamond-like carbon MEMS

Luo¹,

Fu²,

Le³

et al. 2007

J. Micromech. Microeng.

189

View full text Add to dashboard Cite

show abstract

“…The saturated amount of the adsorption (Γ ∞ ) and the adsorption equilibrium constant (Κ) were 14.4 µmol m -2 and 1.8 × 10 3 M -1 , respectively. From this isotherm, the adsorption area per ASV2/18 molecule was found to be 11.6 Å 2 .…”

Section: Resultsmentioning

confidence: 95%

“…The interest in the deposition of well-defined organic thin films has been increasing due to their application in organic electronic devices, such as memory storage devices, organic solar cells, organic field effect transistors, sensors, etc. In some of these applications, a well-controlled crystallinity , and film thickness are desired. Most of the methods used to deposit highly ordered film are dry processes, for example, CVD, PVD, etc…”

Section: Introductionmentioning

confidence: 99%

Organic Thin Film Formation Using Asymmetric Surface-Active Viologens

2006

View full text Add to dashboard Cite

In the present study, asymmetric surface-active viologens were applied successfully for the thin film formation of organic pigments using the immersion plating technique. The influences of the hydrophobicity of the surfactants and the pH of the plating solution on the film formation were investigated. In addition, the interfacial chemistry and electrochemistry of the surfactants were studied, and the mechanism of the film formation has been proposed and discussed.

show abstract

“…A study by Zheng et al presented a UV sensor that could detect short UV wavelengths below 200 nm using AlN micro/nanowires and compared the parameters of extensively used semiconductors in UV sensors [ 15 ]. In addition, many engineering studies have been conducted on UV sensors with various materials, such as titanium dioxide or diamond, to improve the performance of UV sensors [ 17 , 18 , 19 , 20 , 21 ]. In particular, niobium pentoxide has a much higher sensitivity and external quantum efficiency than some other employed materials, and it has been extensively studied as a UV sensor [ 17 ].…”

Section: Introductionmentioning

confidence: 99%

Photo-Rheological Fluid-Based Colorimetric Ultraviolet Light Intensity Sensor

Min

Kim

2019

Sensors

View full text Add to dashboard Cite

This study presents an introduction to a new type of ultraviolet (UV) light intensity sensor using photo-rheological (PR) fluids whose properties, such as color, can be changed by UV light. When the PR fluids were irradiated by UV light, colorimetric transitions were observed. Effectively, this means that their color changed gradually from yellow to red. The degree of the color change depended on the UV light intensity and was characterized by the hue value of the images acquired with a compact image sensor. We demonstrated that UV light-responsive capabilities can be readily imparted to PR fluids, and that the colorimetric responses to different UV light intensities can be used to measure the UV light intensities.

show abstract

Durable ultraviolet sensors using highly oriented diamond films

Cited by 13 publications

References 21 publications

Diamond and diamond-like carbon MEMS

Diamond and diamond-like carbon MEMS

Organic Thin Film Formation Using Asymmetric Surface-Active Viologens

Photo-Rheological Fluid-Based Colorimetric Ultraviolet Light Intensity Sensor

Contact Info

Product

Resources

About