Kinetics of deposition of Cu thin films in supercritical carbon dioxide solutions from copper bis͑di-isobutyrylmethanate͒ ͕Cu͓͑CH 3 ͒ 2 CH͑CO͒CH͑CO͒CH͑CH 3 ͒ 2 ͔ 2 ͖, Cu͑dibm͒ 2 ͒, a F-free copper͑II͒ complex, via hydrogen reduction were studied. A flow-type reaction system was employed to control each deposition parameter independently and at a constant value. Apparent activation energies for Cu growth were determined for a temperature range of 200-260°C as a function of hydrogen concentration.The determined values varied from 0.35 to 0.63 eV and decreased as hydrogen concentration increased. At a deposition temperature of 200°C, growth rate followed a Langmuir-type dependence against Cu͑dibm͒ 2 and hydrogen concentrations, showing first-order dependence at lower concentrations and zero-order dependence at higher concentrations. At a higher deposition temperature of 240°C, no saturation in the growth rate was observed. A Langmuir-Hinshelwood-type growth mechanism was discussed, and a rate equation for growth was proposed, taking into account the temperature dependence of both the rate constant of the rate-determining reaction and adsorption equilibrium constants. The hydrogen concentration dependence of the apparent activation energy for Cu growth was discussed with this rate equation.
A 6-dimensional grand unified theory with the compact space having the topology of a real projective plane, i.e., a 2-sphere with opposite points identified, is considered. The space is locally flat except for two conical singularities where the curvature is concentrated. One supersymmetry is preserved in the effective 4d theory. The unified gauge symmetry, for example SU(5) , is broken only by the non-trivial global topology. In contrast to the Hosotani mechanism, no adjoint Wilson-line modulus associated with this breaking appears. Since, locally, SU(5) remains a good symmetry everywhere, no UV-sensitive threshold corrections arise and SU(5)-violating local operators are forbidden. Doublettriplet splitting can be addressed in the context of a 6d N = 2 super Yang-Mills theory with gauge group SU(6). If this symmetry is first broken to SU(5) at a fixed point and then further reduced to the standard model group in the above non-local way, the two light Higgs doublets of the MSSM are predicted by the group-theoretical and geometrical structure of the model.
To fabricate a Si nanohole array, a Ag dot array was patterned on Si using nanolithography with self-assembled polystyrene nanoparticles as a mask, followed by Ag-catalytic etching. The Ag dots were triangular, approximately 80 nm on a side. The nanoholes had an approximately 60-nm-diameter circular cross-section. The nanohole depth was 2-3 μm. The Si nanoholes were filled with Cu by supercritical fluid chemical deposition using bis (diisobutylmethanate) copper (Cu (dibm) 2) as a precursor.
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