21114 Fabrication of Si nano-holes and Cu fill using supercritical CO_2

Tamai, Kakeru; Matsubara, Masahiro; Lee, Chia Lung; Matsubara, Michio; Kondoh, Eiichi

doi:10.1299/jsmekanto.2009.15.475

The Proceedings of Conference of Kanto Branch

2009

DOI: 10.1299/jsmekanto.2009.15.475

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21114 Fabrication of Si nano-holes and Cu fill using supercritical CO_2

Kakeru Tamai

Masahiro Matsubara

Chia Lung Lee

et al.

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21114 Fabrication of Si nano-holes and Cu fill using supercritical CO_2

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