The effect of microcavitation on the 3D structure of the liquid atomization process in a gasoline injector nozzle was numerically investigated and visualized by a new integrated computational fluid dynamics (CFD) technique for application in the automobile industry. The present CFD analysis focused on the primary breakup phenomenon of liquid atomization which is closely related to microcavitation, the consecutive formation of liquid film, and the generation of droplets by a lateral flow in the outlet section of the nozzle. Governing equations for a high-speed lateral atomizing injector nozzle flow taking into account the microcavitation generation based on the barotropic large eddy simulation-volume of fluid model in conjunction with the continuum surface force model were developed, and then an integrated parallel computation was performed to clarify the detailed atomization process coincident with the microcavitation of a high-speed nozzle flow. Furthermore, data on such factors as the volume fraction of microcavities, atomization length, liquid core shapes, droplet-size distribution, spray angle, and droplet velocity profiles, which are difficult to confirm by experiment, were acquired. According to the present analysis, the atomization rate and the droplets-gas atomizing flow characteristics were found to be controlled by the generation of microcavitation coincident with the primary breakup caused by the turbulence perturbation upstream of the injector nozzle, hydrodynamic instabilities at the gas-liquid interface, and shear stresses between the liquid core and periphery of the jet. Furthermore, it was found that the energy of vorticity close to the gas-liquid interface was converted to energy for microcavity generation or droplet atomization.

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The fundamental characteristics of the resist removal-cleaning system using cryogenic micro-solid nitrogen spray flow were investigated by a new type of integrated measurement technique. The present system utilizes the micro-solid nitrogen (SN2) which consists of the fine solid nitrogen particle produced by the high-speed collision of subcooled liquid nitrogen and the cryogenic gaseous helium (cryogen). According to present study, the effect of ultra-high heat flux cooling on the resist removal performance due to the rapid thermal contraction of resist material is clarified in detail. Furthermore, the effect of ultrasonic atomization of micro-solid nitrogen on ultra-clean performance of the wafer is newly founded.

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Clarifying the mechanism of particle removal by megasonic cleaning and multiple-bubble dynamics in megasonic fields is essential for removing contaminant particles during nanodevice cleaning without pattern damage. In particular, the effect of the interaction of multiple bubbles on bubble-collapse behaviour and impulsive pressure induced by bubble collapse should also be discussed. In this study, a compressible locally homogeneous model of a gas–liquid two-phase medium is used to numerically analyse the multiple-bubble behaviour in a megasonic field. The numerical results indicate that, for bubbles with the same equilibrium radius, the natural frequency of the bubble decreases, and bubbles with smaller equilibrium radii resonate with the megasonic wave as the number of bubbles increases. Therefore, the equilibrium radius of bubbles showing maximum wall pressure decreases with an increasing number of bubbles. The increase in bubble number also results in chain collapse, inducing high wall pressure. The effect of the configuration of bubbles is discussed, and the bubble–bubble interaction in the concentric distribution makes a greater contribution to the decrease in the natural frequency of bubbles than the interaction in the straight distribution.

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