Numerical study of cryogenic micro-slush particle production using a two-fluid nozzle

Ishimoto, Jun

doi:10.1016/j.cryogenics.2008.10.004

Cited by 13 publications

(15 citation statements)

References 17 publications

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“…They also were investigated the choking phenomenon with high Mach number. Both experimental and numerical work of the microslush jet of a two-fluid nozzle were analyzed and examined by Ishimoto [3]. The atomization and flow characteristics were studied using micro-slush nitrogen particles in a two-fluid nozzle.…”

Section: Introductionmentioning

confidence: 99%

Prediction of the Initial Drop Size and Velocity Distribution in the Cold Cryogenic Spray

Majhool¹,

Jasim²

2020

IJHT

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The polydispersed nature of the spray is captured through the use of probability density functions based on the maximum entropy method to stand for the complete atomization characteristics of spray dynamics. The droplet and velocity size distributions are practical tools for the analysis of sprays cooling. The special benefit of the model is a Eulerian based which is less computationally intensive when compared to models that are based on the Lagrangian approach that tracks droplet parcel. The accuracy of using Lagrangian approach in polydispersed phase is always accurately less than Eulerian approach because it depends on the number of parcels while in Eulerian approach it depends on the proposed continuous distribution function. The main intent of the current work is to evaluate the capability of using the model for the initial predictions of the droplet size and velocity distribution for liquid nitrogen spray of solid-cone pressure swirl nozzle. The use of liquid injection pressure cases of up to 0.6MPa and spray cone angles of just 30◦ from three different sets of experimental data. The results being characterized are spray drop size distribution, liquid volume fraction and spray cone angle values. The unsteady analyses of the effect of injection pressure are studied on the cryogenic liquid nitrogen. The numerical results show that the maximum entropy method applies to liquid cryogenic spray and indicates that the model reacts correctly to changes in different injection pressures. Comparisons are also made with measured drop size distribution data that are reasonably captured and the spray cone angle is found to be in good agreement during initial and far-field spray angles.

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Section: Introductionmentioning

confidence: 99%

Prediction of the Initial Drop Size and Velocity Distribution in the Cold Cryogenic Spray

Majhool¹,

Jasim²

2020

IJHT

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“…In the present study, the innovative characteristics of the cryogenic single-component micro solid nitrogen (SN 2 ) particle production using a Laval nozzle and its application to the physical resist removal-cleaning process were investigated by a measurement-coupled computational technique. In the conventional method for solid nitrogen particle generation proposed by the authors [5], the use of cryogenic helium gas was required as a refrigerant. However, since helium is very expensive due to being specified as a strategic material and its rarity, there is a serious problem of cost for its use in the cleaning process.…”

Section: Application Of Micro-sn 2 Spray To Semiconductor Wafer Cleanmentioning

confidence: 99%

“…Photo resist can be removed and cleaned from the wafer surface due to the interaction of the particle impingement of inertial forces and the rapid thermal contraction effect (thermomechanical effect of the resist), which is based on the ultra-high heat flux cooling effect of the inherent characteristics of cryogenic solid particles which accompany phase change. In our previous research [5], the macroscopic thermal characteristics of solid nitrogen (SN 2 ) spray cooling performance was partially clarified. However, microscopic heat transfer and hydrodynamic behavior of a single cryogenic SN 2 particle impinging on a heated substrate have not been sufficiently investigated.…”

Section: Introductionmentioning

confidence: 99%

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Ultra-high heat flux cooling characteristics of cryogenic micro-solid nitrogen particles and its application to semiconductor wafer cleaning technology

Ishimoto¹,

Oh²,

Zhao³

et al. 2014

AIP Conference Proceedings

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Abstract. The ultra-high heat flux cooling characteristics and impingement behavior of cryogenic micro-solid nitrogen (SN 2 ) particles in relation to a heated wafer substrate were investigated for application to next generation semiconductor wafer cleaning technology. The fundamental characteristics of cooling heat transfer and photoresist removal-cleaning performance using micro-solid nitrogen particulate spray impinging on a heated substrate were numerically investigated and experimentally measured by a new type of integrated computational-experimental technique. This study contributes not only advanced cryogenic cooling technology for high thermal emission devices, but also to the field of nano device engineering including the semiconductor wafer cleaning technology.

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“…Thus, the application of a fine solid nitrogen spray for physical semiconductor cleaning methods without the use of water would be very useful. Therefore, the application of cryogenic high-speed spray of micro-solid nitrogen 15 (SN 2 ) to resist-removal and a semiconductor wafer ultra-cleaning system is the focus of great interest. In order to effectively apply the use of the high-performance of such cryogenic solid particles in the field of advanced nano technology, our laboratory has developed a new physical semiconductor cleaning method using cryogenic spray.…”

mentioning

confidence: 99%

Photoresist Removal-Cleaning Technology Using Cryogenic Micro-Solid Nitrogen Spray

Ishimoto

Koike

et al. 2013

ECS J. Solid State Sci. Technol.

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The fundamental characteristics of a thermomechanical resist removal-cleaning system using cryogenic micro-nano solid nitrogen spray flow was investigated using a new type of integrated measurement coupled numerical technique. The effect of ultra-high heat flux cooling on the resist removal performance due to the thermal contraction of resist material was clarified. It was numerically predicted that resist removal performance could be improved by the scraping effect of impinging micro-solid nitrogen particle with plastic deformation in the narrow region between the resist. Furthermore, it was numerically and experimentally found that the hybrid interactive effects of fluid mechanical force by impingement of micro-solid particles and the thermomechanical effect due to ultra-high heat transfer characteristics contribute to the resist removal-cleaning process.

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Numerical study of cryogenic micro-slush particle production using a two-fluid nozzle

Cited by 13 publications

References 17 publications

Prediction of the Initial Drop Size and Velocity Distribution in the Cold Cryogenic Spray

Prediction of the Initial Drop Size and Velocity Distribution in the Cold Cryogenic Spray

Ultra-high heat flux cooling characteristics of cryogenic micro-solid nitrogen particles and its application to semiconductor wafer cleaning technology

Photoresist Removal-Cleaning Technology Using Cryogenic Micro-Solid Nitrogen Spray

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