This paper reports on a novel concept and realization of a variable reluctance micro motor consisting of a high aspect ratio fabricated stator and a separate traveler guided by friction or ball bearings. The flux is generated and guided in plane by a three dimensional meander coil wound around laterally toothed stator poles. The traveler's conih shaped poles reach in between the stator poles and therefore are attracted from both sides. Thus, the attraction forces exceeding thrust, common to any VR-motor concept, are eliminated. The magnetic NiFe-structures and Cu-conductors are fabricated by electroplating through high aspect ratio photolithographic masks. SUS photo epoxy is used as embedding material enabling the realization of high aspect ratio via interconnects.
Based on a previously developed three phase variable reluctance (VR) linear microactuator design features, improving the dynamic properties, were investigated. The active part exhibits, as in the case of its predecessor, permalloy yokes and stator poles with teeth, and is fabricated using thin ®lm technology. Improvements regarding the dynamic motor range were made by varying the number of phases. The new design has substantially improved the dynamic properties, due to the fact that the six phase design greatly reduced the location dependent driving force ripple.
Micro electro-mechanical systems (MEMS) technology opens up new ways of miniaturizing electromagnetic motors. A very promising approach for building miniature linear actuators is to fabricate the stator as well as the traveler separately and merging the motor components in a microassembly process [1]. This paper describes design, fabrication, and evaluation results of a linear synchronous actuator following this basic approach.
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