Linear variable reluctance (VR) micro motor with horizontal flux guidance: concept, simulation, fabrication and test

Seidemann, V.; Edler, J.; Büttgenbach, S.; Stölting, Hans-Dieter

doi:10.1109/sensor.2003.1217040

Cited by 15 publications

(7 citation statements)

References 7 publications

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“…Bearings and guidance Different approaches have been made in order to deal with the friction that becomes a dominating effect especially on miniaturisation of linear motors due to Maxwell's normal forces, which attract stator and traveller. The first approach was the use of roller bearings made from ruby balls with a diameter of 200 mm (Seidemann et al, 2003). It was successfully tested with different types of actuators.…”

Section: Current Density and Temperaturementioning

confidence: 99%

Miniaturisation of electrical machines

Ponick

2011

COMPEL - The International Journal for Computation and Mathematics in Electrical and Electronic Engineering

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Purpose-Approaches for a miniaturisation of electrical machines that are based on an electromagnetic principle have to overcome numerous challenges. Some of these are only a result of the rules of growth (or shrinkage), some are a result of the micro technological fabrication processes. This paper aims to give an overview of the current state of the art including various examples of linear and rotating micro actuators that have been realised. Design/methodology/approach-The paper presents details of further miniaturisation by using thin film technology for depositing and structuring soft magnetic and hard magnetic material as well as copper for conductors and insulation. Findings-There are numerous limitations for the miniaturisation with respect to material properties, friction/guidance, etc. and this paper illustrates ways to overcome these limitations. Originality/value-The paper presents a compact overview on the achievements gained in 12 years of research within a collaborative research centre of the German DFG.

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Section: Current Density and Temperaturementioning

confidence: 99%

Miniaturisation of electrical machines

Ponick

2011

COMPEL - The International Journal for Computation and Mathematics in Electrical and Electronic Engineering

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“…1) (Seidemann et al 2003). The magnetic flux closes over the air gaps between the stator and the traveller poles and the traveller poles itself.…”

Section: Components For a Linear Variable Reluctance Micro Motormentioning

confidence: 99%

Fabrication of drive and guide components for micro motors

et al. 2008

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This paper provides a contribution to the technology and fabrication of functional components for micro motors based on an electromagnetic principle. The focus of this research is on components for the drive, guide and bearing for magnetic actuator systems. The technology and fabrication process of an electromagnetic guide is presented in detail. Its active principle is based upon repellent magnetic forces. Furthermore, the components of a linear variable reluctance micro motor are described. An improvement of driving forces has been achieved in comparison to the first prototype by determined optimizations. In addition, the weight of the traveller could be decreased. The fabrication of compact coil designs for the electromagnetic guide as well as the optimization of components for the reluctance motor are mainly attributed to the implementation of new fabrication technologies and new materials like inorganic insulation layers and electrodepositable photo resists.

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“…It is named 'horizontal motor' because the path of the main magnetic flux is parallel to the wafer [2]. The advantage of this type of motor is the compensation of the Maxwell normal forces between stator and traveller, which are common to any electromagnetic linear motor concept.…”

Section: The Horizontal Motormentioning

confidence: 99%

A Micro Linear Motor with Integrated Passive Magnetic Guidance

Gehrking

Demmig

Ponick

et al. 2006

IECON 2006 - 32nd Annual Conference on IEEE Industrial Electronics

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This paper reports on a micro linear motor with integrated passive magnetic guidance and the differences when designing such linear motors using micro fabrication techniques like sputtering with respect to normal techniques like inserting fabricated coils into a magnetic yoke. The passive magnetic guidance could be integrated without the need of further components. Special rules resulting from the different materials and fabrication processes will be discussed and analyzed using a finite element method. As a result of the rules, a linear stepping motor has been designed and fabricated. At the end, the results of thermal and force measurements of a fabricated micro motor are presented and show the usability of the actuator and the quality of the calculation tools.

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Linear variable reluctance (VR) micro motor with horizontal flux guidance: concept, simulation, fabrication and test

Cited by 15 publications

References 7 publications

Miniaturisation of electrical machines

Miniaturisation of electrical machines

Fabrication of drive and guide components for micro motors

A Micro Linear Motor with Integrated Passive Magnetic Guidance

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