A Micro Linear Motor with Integrated Passive Magnetic Guidance

Gehrking, R.; Demmig, S.; Ponick, Bernd; Feldmann, M.; Büttgenbach, S.

doi:10.1109/iecon.2006.348046

Cited by 14 publications

(3 citation statements)

References 3 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In recent years, micro fabrication technology of micro permanent magnet has been studied [16][17][18][19], it has been reported that magnetic bearings composed of permanent magnets are used in MEMS actuators [20][21][22]. Compared with mechanical guide, magnetic guide has the advantages of non-contact and adjustable stiffness, and has broad application in the field of magnetic actuator [23,24].…”

Section: Introductionmentioning

confidence: 99%

A long-stroke planar linear actuator equipped with magnetic guide

Liu

Li²,

Qu³

et al. 2022

J. Micromech. Microeng.

View full text Add to dashboard Cite

This paper introduces the design, fabrication and characterization of a micro electromagnetic linear actuator integrated with magnetic guide. The actuator consists of a slider, a stator and a magnetic guide. A magnetic guide is used to replace the mechanical rail of conventional linear actuator to ensure the linear motion and to avoid friction. The purpose of this paper is to study the influence of magnetic guide on the dynamic characteristics of electromagnetic linear actuator and measuring techniques for micro-actuators. To test the resistance to motion and output thrust force of the actuator, a cantilever type force sensor is proposed, which can measure the small force in ~mN order, and the measurement error is less than 3%. Using this sensor, the output thrust measured is higher than 10mN when 1A current is applied, and the friction force of the actuator measured is about 7.73mN. Two-phase square wave and sine wave current are used to drive the actuator, the minimum driving current and frequency of the actuator are less than 0.1A and 1Hz respectively. The actuator attains a maximum stable moving speed of 0.15m/s with the input signal frequency of below 250Hz. In addition, the anti-interference capability of the actuator is evaluated through simulations and experiments. These results show that the actuator can bear an interference 45 times its own gravity in the directions that are perpendicular to the moving freedom, and can adjust the direction of motion automatically when the rotation angle in three orthogonal directions is less than 6 °.

show abstract

Section: Introductionmentioning

confidence: 99%

A long-stroke planar linear actuator equipped with magnetic guide

Liu

Li²,

Qu³

et al. 2022

J. Micromech. Microeng.

View full text Add to dashboard Cite

show abstract

“…Klein reported some preliminary results of a micro induction motor, in which the motor is made of Ni and the stator is made of an NiFe wound by multi-turn Cu coils [12]. Buttgenbach et al simplified coil configuration from multi-turn to meander pattern, fabricated motors with linear motion [13,14] and rotary motion [15].…”

Section: Introductionmentioning

confidence: 99%

A self-attachable and self-alignable micro electromagnetic linear actuator

Zhi¹,

Tang²,

Wang³

et al. 2020

J. Micromech. Microeng.

View full text Add to dashboard Cite

This paper presents the design, fabrication and characterization of a novel micro electromagnetic linear actuator, which exhibits two highlights: slider self-alignment and self-attachment capability. Such characters are realized by deliberately utilizing the attractive force between the permanent magnets (Nd2Fe14B) of the slider and nickel ferromagnetic cores embedded in the stator. Actuation is achieved via thrust from both meander micro copper coils and nickel ferromagnetic cores in the stator to the permanent magnets of the slider. The actuator is fabricated by the micro machining process. The surface magnetic property of the slider is simulated and experimentally measured. The eccentric experiment is conducted to evaluate the attraction force between the slider and stator, which proves its self-attachment characteristics. The device is actuated by two-phase sinusoidal currents with a 0.5 A amplitude under an open-loop condition. The slider demonstrates self-alignment movements before moving forward when misalignment occurs. The actuation experimental results show that the average velocity of the slider reaches 4 mm s–1 and 12 mm s–1 at 10 Hz and 30 Hz, respectively. Further increasing the input frequency to 50 Hz leads to the unsteady actuation state, indicating the actuator bandwidth is less than 50 Hz under an open-loop condition.

show abstract

“…Thermographic measurements revealed a maximum temperature of 60 °C @ 0.9 A requiring an active cooling of the motor. A crucial issue, which has to be taken into account when designing VR micromotors, is the experimental finding that the permeability of the electroplated NiFe layers varies with the layer height [29]. The most likely cause for this behavior is the intrinsic process-related stress induced during film growth.…”

Section: Rotatory Vr Stepper Motormentioning

confidence: 99%

Electromagnetic Micromotors—Design, Fabrication and Applications

Büttgenbach

2014

Micromachines

View full text Add to dashboard Cite

Abstract:Microactuators have become essential elements of microelectromechanical systems, for example, for positioning purposes and for fluid-handling tasks in microfluidic systems. UV depth lithography and other new micromachining technologies, which have been developed since the 1990s, have initiated extensive investigations of electromagnetic microactuators, which are characterized by high forces, large deflections, low driving voltages resulting from low input impedances and robustness under harsh environments. This paper reviews the comprehensive research on the design, fabrication and application of electromagnetic micromotors performed in our laboratory over the past years.

show abstract

A Micro Linear Motor with Integrated Passive Magnetic Guidance

Cited by 14 publications

References 3 publications

A long-stroke planar linear actuator equipped with magnetic guide

A long-stroke planar linear actuator equipped with magnetic guide

A self-attachable and self-alignable micro electromagnetic linear actuator

Electromagnetic Micromotors—Design, Fabrication and Applications

Contact Info

Product

Resources

About