This paper reports on a micro linear motor with integrated passive magnetic guidance and the differences when designing such linear motors using micro fabrication techniques like sputtering with respect to normal techniques like inserting fabricated coils into a magnetic yoke. The passive magnetic guidance could be integrated without the need of further components. Special rules resulting from the different materials and fabrication processes will be discussed and analyzed using a finite element method. As a result of the rules, a linear stepping motor has been designed and fabricated. At the end, the results of thermal and force measurements of a fabricated micro motor are presented and show the usability of the actuator and the quality of the calculation tools.
This paper reports on a micro linear stepping employed materials that must be considered in the design of motor which is supplied by a dc-dc converter. The micro linear such micro motors. In this respect, the flexibility ofthe layout motor is built up by using micro fabrication techniques like is strongly limited. For example, the permeability of the used sputtering, UV depth lithography and electroplating [1, 2, 3]. In soft magnetic materials strongly depends on the layer height. order to adjust the stator current, an adapted drive has been This must be considered in the design of the soft magnetic developed. Due to the very small inductances of the motor coils, the chosen dc-dc converter works with a switching frequency of flux guides [6]. more than 1 MHz. Nevertheless, the current is not constant at Furthermore, the guidance of such micro linear motors is a all, because the time constant of the stator winding is only challenge. The Maxwell normal forces between stator and 100 ns. The effects due to the harmonics of the voltage supply traveller of uncompensated linear motors, which can exceed will be considered and analysed by using transient finite element the driving force by a factor of 10, cause friction forces method simulations. Therefore, a FEM model of the motor for (depending on the quality of the guidance), which can transient analysis has been developed and the losses have been considerably affect the functionality of the motor. A solution calculated. It could be shown that the additional motor losses to reduce the high friction forces is the concept of the due to eddy currents, skin effect and current displacement are reluctance motor with horizontal flux guidance with negligible. But it has to be taken into account that the increase of the r.m.s. value of the current caused by the current ripples compense Mmaa results in higher copper loss having a constant mean value of the guidance [7]. current.
III. THE HORIZONTAL MOTOR
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