Design and simulation of essential parts of active microsystems

Edler, J.; Germer, C.; Hansen, Ulli; Kopp, D.; Li, J.

doi:10.1007/s00542-003-356-1

Cited by 4 publications

(2 citation statements)

References 2 publications

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“…Most of the related studies are based on a simple lumped-parameters system modeling the biosensor using the Euler-Bernoulli beam theory [21][22][23]. The finite element method has been extensively implemented for numerically modeling MC based systems [24][25][26][27][28][29][30][31][32][33]. It has emerged as a promising tool for estimating the geometry and bending stiffness of MCs [29], identifying the material and geometrical parameters of microstructures [30], verification of analytical models [31] and fabrication [32] of MCs.…”

Section: Introductionmentioning

confidence: 99%

Comprehensive distributed-parameters modeling and experimental validation of microcantilever-based biosensors with an application to ultrasmall biological species detection

Faegh

Jalili

2012

J. Micromech. Microeng.

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Nanotechnological advancements have made a great contribution in developing label-free and highly sensitive biosensors. The detection of ultrasmall adsorbed masses has been enabled by such sensors which transduce molecular interaction into detectable physical quantities. More specifically, microcantilever-based biosensors have caught widespread attention for offering a label-free, highly sensitive and inexpensive platform for biodetection. Although there are a lot of studies investigating microcantilever-based sensors and their biological applications, a comprehensive mathematical modeling and experimental validation of such devices providing a closed form mathematical framework is still lacking. In almost all of the studies, a simple lumped-parameters model has been proposed. However, in order to have a precise biomechanical sensor, a comprehensive model is required being capable of describing all phenomena and dynamics of the biosensor. Therefore, in this study, an extensive distributed-parameters modeling framework is proposed for the piezoelectric microcantilever-based biosensor using different methodologies for the purpose of detecting an ultrasmall adsorbed mass over the microcantilever surface. An optimum modeling methodology is concluded and verified with the experiment. This study includes three main parts. In the first part, the Euler–Bernoulli beam theory is used to model the nonuniform piezoelectric microcantilever. Simulation results are obtained and presented. The same system is then modeled as a nonuniform rectangular plate. The simulation results are presented describing model's capability in the detection of an ultrasmall mass. Finally the last part presents the experimental validation verifying the modeling results. It was shown that plate modeling predicts the real situation with a degree of precision of 99.57% whereas modeling the system as an Euler–Bernoulli beam provides a 94.45% degree of precision. The detection of ultrasmall immobilized enzyme molecules over the cantilever surface was achieved using a self-exciting piezoelectric-based microcantilever in the dynamic mode.

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Section: Introductionmentioning

confidence: 99%

Comprehensive distributed-parameters modeling and experimental validation of microcantilever-based biosensors with an application to ultrasmall biological species detection

Faegh

Jalili

2012

J. Micromech. Microeng.

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“…The finite element method (FEM) has been widely employed to simulate the static and dynamic behavior of microstructures (Meroni and Mazza 2004;Edler et al 2004;Huber and Aktaa 2003;Liu et al 2003;Han and Kwak 2001). Applying FEM to analyze a microstructure requires the geometrical and material properties of the structure as input parameters.…”

Section: Introductionmentioning

confidence: 99%

Identification of material and geometrical parameters for microstructures by dynamic finite element model updating

Chen¹,

Gau

2006

Microsyst Technol

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This paper describes a procedure to identify material and geometrical parameters for microstructures using the concept of finite element model updating. This scheme utilizes measured and finite element analysis (FEA) natural frequencies that are paired together according to their mode shapes, and it incorporates an optimization sequence that formulates the frequency differences as an error vector to be minimized. To demonstrate the effectiveness of the proposed procedure, two examples are shown in this paper. One example involves a microcantilever fabricated from a singlecrystalline silicon wafer, and the updating process is applied on the cantilever to identify its Young's modulus. The identified Young's modulus (along <100> direction) of 130.29 GPa is very comparable to those in the literature. The other example concerns a commercial, V-shaped silicon nitride probe used in an atomic force microscope. The natural frequencies and mode shapes of the probe are measured, the FEA performed, and the probe thickness and the Young's modulus of the silicon nitride substrate determined. The identified thickness is also verified by SEM images of the probe. Both examples show that the updating procedure converged in just a few iterations.

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A novel self-sensing piezoelectric microcantilever-based sensor for detection of ultrasmall masses and biological species

Faegh¹

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Design and simulation of essential parts of active microsystems

Cited by 4 publications

References 2 publications

Comprehensive distributed-parameters modeling and experimental validation of microcantilever-based biosensors with an application to ultrasmall biological species detection

Comprehensive distributed-parameters modeling and experimental validation of microcantilever-based biosensors with an application to ultrasmall biological species detection

Identification of material and geometrical parameters for microstructures by dynamic finite element model updating

A novel self-sensing piezoelectric microcantilever-based sensor for detection of ultrasmall masses and biological species

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