Abstract:We demonstrate spectral filtering with state-of-the-art Bragg gratings in plasmonic V-groove waveguides fabricated by wafer scale processing based on nanoimprint lithography. Transmission spectra of the devices having 16 grating periods exhibit spectral rejection of the channel plasmon polaritons with 8.2 dB extinction ratio and −3 dB bandwidth of ∆λ = 39.9 nm near telecommunications wavelengths. Near-field scanning optical microscopy measurements verify spectral reflection from the grating structures, and the oscillations of propagating modes along grating-less Vgrooves correspond well with effective refractive index values calculated by finite element simulations in COMSOL. The results represent advancement towards the implementation of plasmonic V-grooves with greater functional complexity and mass-production compatibility.
Fabrication of a seamless roll mold by direct writing with an electron beam on a rotating cylindrical substrate Fabrication of 100 nm metal lines on flexible plastic substrate using ultraviolet curing nanoimprint lithographyIn this work, we propose an innovative approach to the fabrication of a complete micro/nano fluidic system, based on direct nanoimprint lithography. The fabricated device consists of nanochannels connected to U-shaped microchannels by triangular tapered inlets, and has four large reservoirs for liquid input. A master silicon stamp with the multilevel structures is fabricated first, and then a negative replica is made, to be used as a stamp for ultraviolet nanoimprint lithography (UV-NIL). Afterwards, just one single UV-NIL step is necessary for patterning all the the micro and nanostructures. Furthermore, the devices are made of all-transparent materials, and the method allows flexibility for the type of substrates used. The active material (an inorganic-organic hybrid polymer) used for the fabrication of the device has been carefully chosen, so it has adequate surface properties (inert and hydrophilic) for its direct use for biological applications. Devices having 30 nm wide, 30 nm deep nanochannels have been fabricated, and the successful performance of the fluidic system and the continuity of the nanochannels have been proven by flow tests.
Propagation of channel plasmon-polariton modes in the bottom of a metal V groove has been recently demonstrated. It provides a unique way of manipulating light at nanometer length scale. In this work, we present a method based on nanoimprint lithography that allows parallel fabrication of integrated optical devices composed of metal V grooves. This method represents an improvement with respect to previous works, where the V grooves were fabricated by direct milling of the metal, in terms of robustness and throughput.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.