V-groove plasmonic waveguides fabricated by nanoimprint lithography

Fernández-Cuesta, Irene; Nielsen, Rasmus; Boltasseva, Alexandra; Borrisé, Xavier; Pérez‐Murano, F.

doi:10.1116/1.2779041

Cited by 32 publications

(35 citation statements)

References 6 publications

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“…38 If shallower taper angles are desired for other applications, however, the silicon trench can be modified to reduce the taper angle. 39−41 The measured radius of curvature of these template-stripped gold wedges is approximately 10 nm, consistent with previous reports. 30,42 After metal deposition (Figure 1b), lithography is performed inside the nonplanar surfaces of the V-shaped trenches to create nanogaps that split the resulting metal wedges (Figure 1c).…”

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confidence: 90%

Split-Wedge Antennas with Sub-5 nm Gaps for Plasmonic Nanofocusing

et al. 2016

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We present a novel plasmonic antenna structure, a split-wedge antenna, created by splitting an ultrasharp metallic wedge with a nanogap perpendicular to its apex. The nanogap can tightly confine gap plasmons and boost the local optical field intensity in and around these opposing metallic wedge tips. This three-dimensional split-wedge antenna integrates the key features of nanogaps and sharp tips, i.e., tight field confinement and three-dimensional nanofocusing, respectively, into a single platform. We fabricate split-wedge antennas with gaps that are as small as 1 nm in width at the wafer scale by combining silicon V-grooves with template stripping and atomic layer lithography. Computer simulations show that the field enhancement and confinement are stronger at the tip–gap interface compared to what standalone tips or nanogaps produce, with electric field amplitude enhancement factors exceeding 50 when near-infrared light is focused on the tip–gap geometry. The resulting nanometric hotspot volume is on the order of λ3/106. Experimentally, Raman enhancement factors exceeding 107 are observed from a 2 nm gap split-wedge antenna, demonstrating its potential for sensing and spectroscopy applications.

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confidence: 90%

Split-Wedge Antennas with Sub-5 nm Gaps for Plasmonic Nanofocusing

et al. 2016

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“…Some are based on chemical shape‐controlled synthesis 30, 31. Others rely on new nanofabrication tools: electron‐beam lithography,32, 33 nanoimprint lithography,34, 35 or focused ion beam (FIB) milling36 using liquid metal‐ion sources 37. The emergence of all these nanofabrication techniques has made it possible to engineer the electromagnetic response of noble‐metal nanostructures to an unprecedented accuracy.…”

Section: Plasmonics and Nanoparticlesmentioning

confidence: 99%

Controlling Light Localization and Light–Matter Interactions with Nanoplasmonics

Giannini

Fernández‐Domínguez

Sonnefraud

et al. 2010

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Nanoplasmonics is the emerging research field that studies light-matter interactions mediated by resonant excitations of surface plasmons in metallic nanostructures. It allows the manipulation of the flow of light and its interaction with matter at the nanoscale (10(-9) m). One of the most promising characteristics of plasmonic resonances is that they occur at frequencies corresponding to typical electronic excitations in matter. This leads to the appearance of strong interactions between localized surface plasmons and light emitters (such as molecules, dyes, or quantum dots) placed in the vicinity of metals. Recent advances in nanofabrication and the development of novel concepts in theoretical nanophotonics have opened the way to the design of structures aimed to reduce the lifetime and enhance the decay rate and quantum efficiency of available emitters. In this article, some of the most relevant experimental and theoretical achievements accomplished over the last several years are presented and analyzed.

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“…Kristensen et al [72, 73] have exploited a combination of UV-NIL for the fabrication of sharp V-groove structures. The fabricated structures are presented in Fig.…”

Section: Fabricationmentioning

confidence: 99%

Patterned Plasmonic Surfaces—Theory, Fabrication, and Applications in Biosensing

Chorsi

Zhu

Zhang

2017

J. Microelectromech. Syst.

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Low-profile patterned plasmonic surfaces are synergized with a broad class of silicon microstructures to greatly enhance near-field nanoscale imaging, sensing, and energy harvesting coupled with far-field free-space detection. This concept has a clear impact on several key areas of interest for the MEMS community, including but not limited to ultra-compact microsystems for sensitive detection of small number of target molecules, and “surface” devices for optical data storage, micro-imaging and displaying. In this paper, we review the current state-of-the-art in plasmonic theory as well as derive design guidance for plasmonic integration with microsystems, fabrication techniques, and selected applications in biosensing, including refractive-index based label-free biosensing, plasmonic integrated lab-on-chip systems, plasmonic near-field scanning optical microscopy and plasmonics on-chip systems for cellular imaging. This paradigm enables low-profile conformal surfaces on microdevices, rather than bulk material or coatings, which provide clear advantages for physical, chemical and biological-related sensing, imaging, and light harvesting, in addition to easier realization, enhanced flexibility, and tunability.

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V-groove plasmonic waveguides fabricated by nanoimprint lithography

Cited by 32 publications

References 6 publications

Split-Wedge Antennas with Sub-5 nm Gaps for Plasmonic Nanofocusing

Split-Wedge Antennas with Sub-5 nm Gaps for Plasmonic Nanofocusing

Controlling Light Localization and Light–Matter Interactions with Nanoplasmonics

Patterned Plasmonic Surfaces—Theory, Fabrication, and Applications in Biosensing

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