Abstract— A 10‐in. flat‐panel display (FPD) with surface‐conduction electron‐emitter (SCE) cathodes can be fabricated through a printing process. Ultrafine particle films of the SCEs are deposited by using ink‐jet printing. A prototype achieves full‐color and full‐motion pictures comparable to CRTs. The feasibility of larger and low‐cost SCE displays has been confirmed.
Damage-less full molecular-pore-stack SiOCH (MPS) / Cu interconnect is developed to reduce effective k-value (k eff ).MPS with high endurance against plasma processes is introduced into both via and trench dielectrics without hard mask (HM). Low friction slurry and chemical modification of MPS surface by He-plasma treatment suppress defect generation during direct CMP of the MPS surface. The full-MPS interconnect with low-k (k=3.1) cap demonstrates 10% lower inter-line capacitance and 34% lower inter-layer capacitance than the full-SiOCH (k=3.0) interconnect with SiCN-cap (k=4.9). The effective k-value k eff reduces to 2.67 for the damage-less full MPS structure which is applicable to 32nm LSIs and beyond.
A flash-erase EEPROM cell which consists of a single floating gate transistor is described. The cell is based on self-aligned double polysilicon stacked gate structure without a select transistor. It is programmed and erased by hot electrons at the drain edge similar to a W -E P R O N and by FowlerNordheim tunneling of electrons from the floating gate to the source, respectively.An asymmetry in source and drain regions is introduced to enable fast program/erase operation. In addition, an n + concentration in the source region is optimized to achieve reproducible erasure, which is indispensable to avoid over-erasing problem. The optimized cell enables an erasing time of less than one millisecond with 1 2 . 5 V on the source, and a scatter of erased Vth is almost negligible.Endurance and data retention characteristics is also adequate for implementation in memory chips. The small cell area of 9. 3 g m2 is accomplished in a 0. 8 g m techno 1 cgy.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.