We report for the first time the observation of propagating acoustic waves from constant-overlap and apodized interdigital transducers on y-cut LiNbO3, obtained by a scanning electron microscope using the stroboscopic voltage contrast. It is the most convenient and fastest method known today of observing directly on screen the complex radiation patterns of interdigital transducers on piezoelectric substrates.

There are eight e-beam methods of testing integrated circuits. The principle and performance of the various methods will be discussed in this paper. The performance criteria are voltage resolution and the frequency range in which voltage changes can be detected. From this it is possible todecide which methods are best suited for testing the various IC types available today.

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