High precision electron optical system for absolute and CD-measurements on large substrates

Frosien, J.; Lanio, S.; Feuerbaum, H.P.

doi:10.1016/0168-9002(95)00150-6

Cited by 18 publications

(7 citation statements)

References 2 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…After drying in air, the sample was annealed at 500 1C in Ar/H 2 flow (1300 sccm, 15 vol% hydrogen) for 1 h. Then the temperature was immediately increased up to the cutting set-point (900 1C) and held for 1 h. SEM imaging. SEM images have been recorded with a Zeiss Ultra Plus SEM using 10 keV primary electrons and the in-lens detector that is expected to be sensitive to SE1 and SE2 secondary electrons 39 . For triangulation, images have been recorded with 30 keV electrons in the high-current mode using the SE2 detector.…”

Section: Methodsmentioning

confidence: 99%

Catalytic subsurface etching of nanoscale channels in graphite

et al. 2013

View full text Add to dashboard Cite

Catalytic hydrogenation of graphite has recently attracted renewed attention as a route for nanopatterning of graphene and to produce graphene nanoribbons. These reports show that metallic nanoparticles etch the surface layers of graphite or graphene anisotropically along the crystallographic zig-zag /11-20S or armchair /10-10S directions. The etching direction can be influenced by external magnetic fields or the supporting substrate. Here we report the subsurface etching of highly oriented pyrolytic graphite by Ni nanoparticles, to form a network of tunnels, as seen by scanning electron microscopy and scanning tunnelling microscopy. In this new nanoporous form of graphite, the top layers bend inward on top of the tunnels, whereas their local density of states remains fundamentally unchanged. Engineered nanoporous tunnel networks in graphite allow for further chemical modification and may find applications in various fields and in fundamental science research.

show abstract

Section: Methodsmentioning

confidence: 99%

Catalytic subsurface etching of nanoscale channels in graphite

et al. 2013

View full text Add to dashboard Cite

show abstract

“…1b shows SEM images of an individual mSWNT on SiO 2 /Si before (left) and after (right) EBIO-induced gap formation. The images were recorded with an inlens detector that is expected to be sensitive to SE1 and SE2 secondary electrons 14 . For better visibility of the mSWNT, we used voltage-contrast scanning electron microscopy (VCSEM) to suppress the SEs of the SiO 2 /Si substrate 15 .…”

Section: Resultsmentioning

confidence: 99%

Controlled fabrication of single-walled carbon nanotube electrodes by electron-beam-induced oxidation

Thiele¹,

Engel²,

Hennrich³

et al. 2011

Applied Physics Letters

View full text Add to dashboard Cite

The fabrication of metallic single-walled carbon nanotube electrodes separated by gaps of typically 20 nm width by electron-beam-induced oxidation is studied within an active device configuration. The tube conductance is measured continuously during the process. The experiment provides a statistical evaluation of gap sizes as well as the electron dose needed for gap formation. Also, the ability to precisely cut many carbon nanotubes in parallel is demonstrated.

show abstract

“…The electrostatic lens consists of two electrodes. 1 Due to its large deflection in the second stage of the beam separator, the PE beam cannot be described by paraxial electron optics. At the lower electrode, a so-called cap voltage up to 3 kV can be applied in order to increase the extraction field on the specimen.…”

Section: Concept and Designmentioning

confidence: 99%