Design and implementation of a detector for on-axis electrons for enabling enhanced imaging of topographical structures

Munack, H.; Kögler, Walter; Baumgarten, Holger; Rübekohl, Christian; Adamec, P.; Degenhardt, Ralf; Feuerbaum, H.P.; Winkler, D.

doi:10.1116/1.591075

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

1999

DOI: 10.1116/1.591075

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Design and implementation of a detector for on-axis electrons for enabling enhanced imaging of topographical structures

H. Munack¹,

Walter Kögler²,

Holger Baumgarten³

et al.

Abstract: Comparison of metrology methods for quantifying the line edge roughness of patterned features

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Design and implementation of a detector for on-axis electrons for enabling enhanced imaging of topographical structures

Abstract: Comparison of metrology methods for quantifying the line edge roughness of patterned features

Cited by 0 publications

References 3 publications

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