This paper describes a new technique to determine the basic properties of the active channel of a gallium arsenide (GaAs) metal‐semiconductor field effect transistor (mesfet). The effective gate length, channel thickness, and carrier concentration are determined from dc parameters. A precise method of measuring the dc parameters is also given. The new techniques are demonstrated using a wide variety of sample devices. It is also shown that microwave performance parameters, such as the maximum output power and minimum noise figure, are well predicted by dc parameters. Calculated values of the intrinsic and extrinsic dc parameters, using simple analytical expressions developed in terms of the geometrical and material parameters of a device, are shown to be in excellent agreement with their measured values. These expressions can be used as a basis for device design.
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