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One of the major issues enduring with microscale mechanics has been to design high fidelity miniature machines capable of performing complex operations. Though achieved in some proportion through conventional in-plane and out-of-plane designs, the efficacy of such micro-electromechanical systems (MEMS) structures is highly limited due to complicate fabrication and inadequate robustness. On the other hand, the use of precise robots to assemble MEMS parts of comparatively simpler design to build 3D micromechanical structures has recently emerged as a viable approach. Such modular assemblies of microscale parts typically utilize minimum energy connectors that are multifunctional, e.g., mechanical, electrical etc. The µ 3 is a 3-D microassembly station consisting of 19 DOF arranged into 3 micromanipulators, with additional microgrippers and stereo microscope vision.The platform is capable of motion resolutions of 3nm and is small enough to be used inside of a scanning electron microscope (SEM) for nano-manipulation. In this paper we discuss how systematic identification and calibration of the station, combined with appropriate part connector designs can lead to multi-degree of freedom active MEMS robots assembled on a wafer.

This paper introduces a new feedback algorithm for steering a point robot through an obstacle field. The key innovation is the use of a circulatory field to rotate the robot path around the obstacles instead of the common potential field which repels the robot. This idea is motivated by a charged particle in a magnetic field generated by a current flowing around the obstacle. In constrast, the potential field approach is associated with a repulsive static electric field generated by charges of the same polarity as the robot, on the obstacle. The circulatory field does not generate any spurious local minimum as it does not change the total energy of the system. By combining with an attractive potential field associated with the desired destination, this method achieves global convergence while avoiding collisions with obstacles.

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