Micro and Mesoscale Robotic Assembly

Popa, Dan O.; Stephanou, H.E.

doi:10.1016/s1526-6125(04)70059-6

Cited by 108 publications

(69 citation statements)

References 8 publications

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“…In the first case, processes in which a disordered system of pre-existing components forms an organized structure or pattern as a consequence of specific local interactions among the components themselves, without external direction (Zhou and Chang, 2006). In the second case, a robotic system combined with a microhandling system and an imaging system are used to reach the same objective (Popa and Stephanou, 2004). The robotic microassembly process can be divided into elementary tasks that are sequentially performed: visual detection of the component, positioning of the component, positioning of the end-effectors, grip of the component, transfer of the component, release of the component.…”

Section: Motivationsmentioning

confidence: 99%

“…Indeed, high resolution images lead to precise measurements but very small field-of-view, like low resolution images enable large field-ofview but less precise information (Ralis et al, 2000), (Tao et al, 2005). To overcome this duality, two kinds of solutions had been implemented: a switch between the components of a multiple view system (Yang et al, 2003), (Popa and Stephanou, 2004), (Sun and Chin, 2004), (Abbott et al, 2007), (Probst et al, 2009), or integration of a dynamic zoom control in the visual control (Tao et al, 2005), (Tamadazte et al, 2008b). The other advantage of using a distributed vision system is the ability to have access to the depth of the scene using lateral views (Yang et al, 2005).…”

Section: Previous Research In Mems Assemblymentioning

confidence: 99%

“…Some authors have investigated other visual techniques which consist in using virtual reality to assist the human operator working in teleoperated mode or to directly use these techniques to automate MEMS assembly and handling tasks using vision feedback control (Kawaji and Fukuda, 2001), (Ammi and Ferreira, 2007). As regards the most studied microassembly tasks, we find the positioning, the grip and the insertion (such as peg-in-hole) tasks (Yang et al, 2003), (Popa and Stephanou, 2004), (Tao et al, 2005), (Tamadazte et al, 2009). …”

Section: Previous Research In Mems Assemblymentioning

confidence: 99%

See 2 more Smart Citations

CAD Model-based Tracking and 3D Visual-based Control for MEMS Microassembly

Tamadazte

Marchand

Dembélé

et al. 2010

The International Journal of Robotics Research

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This paper investigates sequential robotic microassembly for the construction of 3D micro-electro-mechanical systems (MEMS) structures using a 3D visual servoing approach. The previous solutions proposed in the literature for these kinds of problems are based on 2D visual control because of the lack of precise and robust 3D measures from the work scene. In this paper, the relevance of the real-time 3D visual tracking method and the 3D vision-based control law proposed is demonstrated. The 3D poses of the MEMS are supplied in real-time by a computer-aided design (CAD) model-based tracking algorithm. This latter is sufficiently accurate and robust to enable a precise regulation toward zero of the 3D error using the proposed pose-based visual servoing approach.Experiments on a microrobotic setup have been carried out to achieve assemblies of two or more 400 µm × 400 µm × 100 µm silicon micro-objects by their respective 97 µm × 97 µm × 100 µm notches with an assembly clearance from 1 µm to 5 µm. The different microassembly processes are performed with a mean error of 0.3 µm in position and 0.35×10 −2 rad in orientation.

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Section: Motivationsmentioning

confidence: 99%

Section: Previous Research In Mems Assemblymentioning

confidence: 99%

Section: Previous Research In Mems Assemblymentioning

confidence: 99%

See 1 more Smart Citation

CAD Model-based Tracking and 3D Visual-based Control for MEMS Microassembly

Tamadazte

Marchand

Dembélé

et al. 2010

The International Journal of Robotics Research

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“…The operation of multiple untethered microrobotic devices have many potential applications in medicine, surveillance, and assembly [13]. In this work we use the term microrobot to denote an untethered robot that fits strictly within a 1 mm 3 volume.…”

Section: Introductionmentioning

confidence: 99%

Simultaneous Control of Multiple MEMS Microrobots

Donald

Levey

Paprotny

et al. 2009

Springer Tracts in Advanced Robotics

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We present control algorithms that implement a novel planar microassembly scheme using groups of stress-engineered microrobots controlled through a single global control signal. The global control signal couples the motion of the devices, causing the system to be highly underactuated. Despite the high degree of underactuation, it is desirable that each robot be independently maneuverable. By exploiting differences in the designs and the resulting electromechanical interaction with the control signal, the behavior of the individual robots can be differentiated. We harness this differentiation by designing the control signal such that some devices remain confined in small circular orbits (limit cycles), while the non-orbiting robots perform work by making progress towards the goal. The control signal is designed to minimize the number of independent control voltage levels that are used for independent control, allowing us to maximize the number of simultaneously controllable devices.Our algorithms were tested on systems of fabricated untethered stress-engineered MEMS microrobots. The robots are 240-280 µm × 60 µm × 7-20 µm in size and are controlled in parallel (simultaneously) within the same operating environment. We demonstrated the feasibility of our control algorithms by accurately assembling 5 different types of planar microstructures.

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“…Use of a monolithic (uniform) process to produce complex micro/nano systems is desirable but, unfortunately, is not always feasible. The current state of the art is to incorporate multiple incompatible components into a single product by utilizing serial assembly techniques, i.e., handling the parts one by one [1], [2]. The first and foremost requirement for the assembly process is to "precisely manipulate" objects.…”

mentioning

confidence: 99%

Scaled Bilateral Teleoperation Using Discrete-Time Sliding-Mode Controller

Khan

Şabanoviç

Nergiz

2009

IEEE Trans. Ind. Electron.

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Abstract-In this paper, the design of a discrete-time slidingmode controller based on Lyapunov theory is presented along with a robust disturbance observer and is applied to a piezostage for high-precision motion. A linear model of a piezostage was used with nominal parameters to compensate the disturbance acting on the system in order to achieve nanometer accuracy. The effectiveness of the controller and disturbance observer is validated in terms of closed-loop position performance for nanometer references. The control structure has been applied to a scaled bilateral structure for the custom-built telemicromanipulation setup. A piezoresistive atomic force microscope cantilever with a built-in Wheatstone bridge is utilized to achieve the nanonewtonlevel interaction forces between the piezoresistive probe tip and the environment. Experimental results are provided for the nanonewton-range force sensing, and good agreement between the experimental data and the theoretical estimates has been demonstrated. Force/position tracking and transparency between the master and the slave has been clearly demonstrated after necessary scaling.

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Micro and Mesoscale Robotic Assembly

Cited by 108 publications

References 8 publications

CAD Model-based Tracking and 3D Visual-based Control for MEMS Microassembly

CAD Model-based Tracking and 3D Visual-based Control for MEMS Microassembly

Simultaneous Control of Multiple MEMS Microrobots

Scaled Bilateral Teleoperation Using Discrete-Time Sliding-Mode Controller

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