Dynamic modeling and input shaping of thermal bimorph MEMS actuators

Popa, Dan O.; Kang, Byoung Hun; Wen, John T.; Stephanou, H.E.; Skidmore, George D.; Geisberger, A.

doi:10.1109/robot.2003.1241799

Cited by 47 publications

(36 citation statements)

References 15 publications

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“…In this technique, the input signals are made more complex by shaping them in a way such that the adverse effects of the system dynamics are minimized (Ex: Bandlimiting the trajectory signal such that the natural frequencies/system resonances were not excited), [109]. For input pre-shaping, an accurate dynamic model of the system is of paramount importance, if any performance improvement is expected.…”

Section: B Open-loop Control With Input Pre-shapingmentioning

confidence: 99%

A Survey of Modeling and Control Techniques for Micro- and Nanoelectromechanical Systems

Ferreira

Aphale

2011

IEEE Trans. Syst., Man, Cybern. C

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Abstract-In the current times, MEMS and NEMS form a major inter-disciplinary area of research involving science, engineering and technology. A lot of work has been reported in the area of modeling and control of these devices, with the aim of better understanding their behavior and improving their performance. This work presents a review of the emerging advances in the modeling and control of these micro-and nanoscale devices and converges on the exciting research in onchip control, with a mechatronics and controls perspective and concludes by projecting future trends.

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Section: B Open-loop Control With Input Pre-shapingmentioning

confidence: 99%

A Survey of Modeling and Control Techniques for Micro- and Nanoelectromechanical Systems

Ferreira

Aphale

2011

IEEE Trans. Syst., Man, Cybern. C

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“…In another demonstration, Popa et al [11] developed a ZVD shaper for the input voltage applied to a thermal bimorph microelectromechanical systems (MEMS) actuator. The shaper parameters were obtained using a simple discrete model.…”

Section: Input Shapingmentioning

confidence: 99%

“…The simulations showed excellent results when the shaper is applied to the discretized model but some residual oscillations existed when the shaper is applied to the FEA model due to modeling errors and ignored nonlinearities. In [12], Popa and co-workers also studied electrostatically actuated MEMS using model reduction and input-shaping techniques.…”

Section: Input Shapingmentioning

confidence: 99%

Input-shaping control of nonlinear MEMS

2007

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We develop a new technique for preshapcal systems (MEMS). In general, MEMS are excited using an electrostatic field which is a nonlinear function of the states and the input voltage. Due to the nonlinearity, the frequency of the device response to a step input depends on the input magnitude. Therefore, traditional shaping techniques which are based on linear theory fail to provide good performance over the whole input range. The technique we propose combines the equations describing the static response of the device, an energy balance argument, and an approximate nonlinear analytical solution of the device response to preshape the voltage commands. As an example, we consider set-point stabilization of an electrostatically actuated torsional micromirror. The shaped commands are applied to drive the micromirror to a desired tilt angle with zero residual vibrations. Simulations show that fast mirror switching operation with almost zero overshoot can be realized using this technique. The proposed methodology accounts for the energy of the significant higher modes and can be used to shape input commands applied to other nonlinear micro-and macro-systems.

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“…To obtain sufficient speed of response in such systems without exciting high-frequency modes, input shaping methods [3], [4] are often used to avoid exciting the vibratory modes. Based on the desired trajectory of the shutter, input signals can be produced using convolution-based preshaping methods.…”

Section: Open-loop Versus Closed-loop Controlmentioning

confidence: 99%