μ³: Multiscale, Deterministic Micro-Nano Assembly System for Construction of On-Wafer Microrobots

Abstract

One of the major issues enduring with microscale mechanics has been to design high fidelity miniature machines capable of performing complex operations. Though achieved in some proportion through conventional in-plane and out-of-plane designs, the efficacy of such micro-electromechanical systems (MEMS) structures is highly limited due to complicate fabrication and inadequate robustness. On the other hand, the use of precise robots to assemble MEMS parts of comparatively simpler design to build 3D micromechanical structures has recently emerged as a viable approach. Such modular assemblies of microscale parts typically utilize minimum energy connectors that are multifunctional, e.g., mechanical, electrical etc. The µ 3 is a 3-D microassembly station consisting of 19 DOF arranged into 3 micromanipulators, with additional microgrippers and stereo microscope vision.The platform is capable of motion resolutions of 3nm and is small enough to be used inside of a scanning electron microscope (SEM) for nano-manipulation. In this paper we discuss how systematic identification and calibration of the station, combined with appropriate part connector designs can lead to multi-degree of freedom active MEMS robots assembled on a wafer.

High‐Yield Automated MEMS Assembly

“…Due to variability in gripper designs and fabrication, it is currently necessary to repeat this step every time a new MEMS gripper is mounted on M 1 . A summary of techniques for mounting MEMS grippers and program the RCR can be found in Das et al [4] and Mayyas et al [13].…”

Precision alignment and assembly of a Fourier transform microspectrometer

“…7), a 3D microassembly station consisting of 19 DOF arranged into 3 manipulators, with additional micro-grippers and stereo microscope vision. The platform is capable of motion resolutions of 3 nm and an accuracy of approximately 1 µm [19]. The accuracy is sufficient for achieving automated assembly of compliant snap-fastener microparts.…”

“…In past work [19], we have discussed aspects related to the yield of automated microassembly of compliant MEMS structures, and concluded that results are highly predictable under certain part design and robot accuracy conditions. In this paper we make use of the multi-robot microassembly cell µ³, located in our lab to configure a microspectrometer via hybrid assembly of silicon and glass sub-mm components.…”

Automated Guiding Task of a Flexible Micropart Using a Two-Sensing-Finger Microgripper

“…Automated robotic microassembly is the final objective which is usually carried out by precise positioning [5], [6], [7] but it is not sufficient for all microassembly tasks [8]. Dual finger microgrippers with feedback are used to automate some microassembly tasks [6], [9].…”