The known vibration-type micro-gyroscopes (VTMG) of planar design operating for microwave circuits too designs are based on application of silicon and its modifications. The specificity of silicon plates profiling process gives the triangle or trapeziform configuration of movable elements torsion' s, and predetermines the intrinsic mechanical stresses. The latter' s, together with thermomechanical stresses arising as a result of application of high temperatures (up to 1200°C) and materials with substantial thermal expansion coefficients (t.e.c.) difference under processing, reduce considerably the reliability of such VTMG.In the given paper, an example of the VTMG design realising formed on the basis of dielectric substrate of anodic alumina (AA) is described. Using of AA, metal films, pins joining exclude of multy-layering and high-temperature operation causing details warping and internal mechanical stresses generation, enhance the VTMG reliability and raise technical and economic indices owing to laboriousness lowering and application of inexpensive materials.
Have developed relatively simple and compact design of microelectromechanical optical switch of electrostatic type containing cardan structure including two movable elements: the outer one, in central part of which the mirror is formed, and which perform beam scanning along the X axis, and the inner one which deflect beam along the Y axis. The movable elements and the basis are connected successively by the torsion pairs positioned along the mutually perpendicular axes. Originality of the design consists in fabrication of inner element in the form of plate having in its central part the cavity, on the bottom of which the electrodes 6 are formed to control the outer element turning, and with the shelves on which the electrodes are formed to turn the inner element. The axes of both pairs of torsions and mirror being positioned in the same plane. The distinctive feature of the switch operation is independence and constancy of the mirror position under any order of signals supply to the control movable and unmoveable electrodes. Corresponding theoretical calculations have been performed, and optimum relations of constructive elements sizes are presented. The switch provides enhancement of spatial addressing precision, reducing of mass and dimension parameters, control apparatus simplification.
Applications prospects for micro-electro-mechanical devices and examples of their design as electrostatic micro-relays, dilatometric sensors, and arrow indicator heads are presented in the paper. Fabrication of these devices is based on unique possibilities of alumina technology to form various design elements in a single monolithic part, as well as on high physical and mechanical parameters of anodic alumina.
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