Anodic alumina based electrostatic micro-relay MEMS device

Efremov, G.I.; Mukhurov, N.I.; Kovalevsky, V. I.

doi:10.1109/asdam.2000.889522

Cited by 2 publications

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“…The reactive force P of the holders is determined by the relation P=n•ky, (2) where n -number of holders, k -holders flexural rigidity coefficient.…”

Section: Xmentioning

confidence: 99%

<title>Anodic alumina as a basis for various-purpose micro-electro-mechanical devices</title>

Efremov¹,

Mukhurov²

2001

SPIE Proceedings

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Applications prospects for micro-electro-mechanical devices and examples of their design as electrostatic micro-relays, dilatometric sensors, and arrow indicator heads are presented in the paper. Fabrication of these devices is based on unique possibilities of alumina technology to form various design elements in a single monolithic part, as well as on high physical and mechanical parameters of anodic alumina.

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“…The reactive force P of the holders is determined by the relation P=n•ky, (2) where n -number of holders, k -holders flexural rigidity coefficient.…”

Section: Xmentioning

confidence: 99%

<title>Anodic alumina as a basis for various-purpose micro-electro-mechanical devices</title>

Efremov¹,

Mukhurov²

2001

SPIE Proceedings

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“…Owing to its flexibility and characteristics, exploration of anodic alumina towards the micro and nanotechnology is worthwhile for the advancement of technology. A number of recent researches and reports established that the anodic alumina is a promising material for the fabrication of various microdevices, and continuously attracting researchers from various technological backgrounds for the further possibilities (5)(6)(7)(8)(9).…”

Section: Introductionmentioning

confidence: 99%

Metallic Micropatterns on Anodic Alumina: Laser-Assisted Exposure of Trapped Seeds for Metallization

et al. 2008

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Microscale metallic patterns are fabricated on the anodic alumina by demonstrating a novel technique. The porous anodic alumina was colored in organic dye solution containing small amounts of palladium acetate and then hydro-thermally sealed. Such coloring and pore-sealing of porous anodic alumina enhanced the absorption of laser beam by the film, facilitating the laser ablation on the film surface. The palladium ions, impregnated during coloring, were trapped underneath the crystalline hydroxide layer that had formed during the hydrothermal treatment. Removing the surface layer with the help of laser beam exposed the palladium on the surface, which acts as seeds for the subsequent electroless plating. Various metallic micro-patterns with thickness of about 2µm were fabricated on the anodic alumina. The metallic patterns were free from cracks or defects, and can be fabricate with high precision.

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Anodic alumina based electrostatic micro-relay MEMS device

Cited by 2 publications

References 0 publications

<title>Anodic alumina as a basis for various-purpose micro-electro-mechanical devices</title>

<title>Anodic alumina as a basis for various-purpose micro-electro-mechanical devices</title>

Metallic Micropatterns on Anodic Alumina: Laser-Assisted Exposure of Trapped Seeds for Metallization

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