Oscillator-type micro-gyroscope on dielectric substrates

Abstract

The known vibration-type micro-gyroscopes (VTMG) of planar design operating for microwave circuits too designs are based on application of silicon and its modifications. The specificity of silicon plates profiling process gives the triangle or trapeziform configuration of movable elements torsion' s, and predetermines the intrinsic mechanical stresses. The latter' s, together with thermomechanical stresses arising as a result of application of high temperatures (up to 1200°C) and materials with substantial thermal expansion coefficients (t.e.c.) difference under processing, reduce considerably the reliability of such VTMG.In the given paper, an example of the VTMG design realising formed on the basis of dielectric substrate of anodic alumina (AA) is described. Using of AA, metal films, pins joining exclude of multy-layering and high-temperature operation causing details warping and internal mechanical stresses generation, enhance the VTMG reliability and raise technical and economic indices owing to laboriousness lowering and application of inexpensive materials.