&lt;title&gt;Analysis of electromechanical parameters of electrostatic microrelay with a movable elastic cantilever electrode&lt;/title&gt;

Efremov, G.I.; Mukhurov, N.I.; Galdetskiy, A.V.

doi:10.1117/12.382309

SPIE Proceedings

2000

DOI: 10.1117/12.382309

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<title>Analysis of electromechanical parameters of electrostatic microrelay with a movable elastic cantilever electrode</title>

G.I. Efremov¹,

N.I. Mukhurov²,

A.V. Galdetskiy³

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“…Width 2l 2 of a protuberance is determined in length of attractive electrodes site, after which in the cantilever scheme at k = 0.4…0.5 the intensive growth of М 1 starts. On calculations [8] it happens at l 2 ≈ 0.6 L. The jolting moment М 2 due to layout of a part of an electrode on a protuberance remains big enough to promote the moment М 1 in an initial phase of rotational displacement.…”

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Analysis of the influence of electrode gap on parameters of optical microscanners

Mukhurov¹,

Efremov²

2004

SPIE Proceedings

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Two design versions are proposed for optical microscanners: the first one -with two steps of the stationary electrode symmetrically arranged on the base relative to the symmetry axis, and the second one -with one step. Both schemes make use of a Push-Pull system, i.e. attraction and repulsion moments are taken into account, which make it possible to obtain basic curve on the relative scale. In the symmetrical scheme, compensation of electrostatic forces is achieved by increasing of the inter-electrode distance under the anchor ends. The optimal value of the working rotation angle of the mirror α T =0.95α max has been obtained for m 0 =0.2; m 1 =0.9; m 2 =0.46. The one-sided scheme uses a repulsion moment value at small rotation angles. It also ensures a controlled rotation of the anchor in the range α T /α max =0.95 with the electrode gap-to-electrode distance ratios of t 1 =0.2t; t 2 =2t. It should be noted that zones of smooth transition on the curves are excluded, which results in considerably increased beam addressing accuracy. Also, a relatively small (1.5…2-fold) increase in the operating voltage is worth noting. Thus, changing of the geometry of the electrode gap can be one of the effective ways towards optimization of optical microscanner parameters.

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Analysis of the influence of electrode gap on parameters of optical microscanners

Mukhurov¹,

Efremov²

2004

SPIE Proceedings

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<title>Analysis of inertia forces influence on operation voltage of electrostatic microrelays</title>

Efremov¹,

Mukhurov²

2001

MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication

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<title>Analysis of electromechanical parameters of electrostatic microrelay with a movable elastic cantilever electrode</title>

Cited by 2 publications

References 1 publication

Analysis of the influence of electrode gap on parameters of optical microscanners

Analysis of the influence of electrode gap on parameters of optical microscanners

<title>Analysis of inertia forces influence on operation voltage of electrostatic microrelays</title>

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