In this manuscript, the authors investigate the growth of indium zinc oxide, indium zinc oxide (InZnO, IZO) as a channel material for thin-film transistors. IZO is grown at atmospheric pressure and a high deposition rate using spatial atomic layer deposition (S-ALD). By varying the ratio of diethylzinc and trimethylindium vapor, the In/(In + Zn) ratio of the film can be accurately tuned in the entire range from zinc oxide to indium oxide. Thin film transistors with an In to Zn ratio of 2:1 show high field-effect mobility—exceeding 30 cm2/V s—and excellent stability. The authors demonstrate large scale integration in the form of 19-stage ring oscillators operating at 110 kHz. These electrical characteristics, in combination with the intrinsic advantages of atomic layer deposition, demonstrate the great potential of S-ALD for future display production.
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Biodegradable porous silicon (pSi) particles are under development for drug delivery applications. The optimum particle size very much depends on medical use, and microparticles can outperform nanoparticles in specific instances. Here we demonstrate the ability of sedimentation to size-select ultrasmall (1–10 μm) nanoporous microparticles in common solvents. Size tunability is quantified for 1–24 h of sedimentation. Experimental values of settling times in ethanol and water are compared to those calculated using Stokes’ Law. Differences can arise due to particle agglomeration, internal gas generation and incomplete wetting. Air-dried and supercritically-dried pSi powders are shown to have, for example, their median diameter d (0.5) particle sizes reduced from 13 to 1 μm and from 20 to 3 μm, using sedimentation times of 6 and 2 h respectively. Such filtered microparticles also have much narrower size distributions and are hence suitable for administration in 27 gauge microneedles, commonly used in intravitreal drug delivery.
Porous silicon layers on wafers are commonly converted into particles by mechanical milling or ultrasonic fragmentation. The former technique can rapidly generate large batches of microparticles. The latter technique is commonly used for making nanoparticles but processing times are very long and yields, where reported, are often very low. With both processing techniques, the porosity and surface area of the particles generated are often assumed to be similar to those of the parent film. We demonstrate that this is rarely the case, using air-dried high porosity and supercritically dried aerocrystals as examples. We show that whereas ball milling can more quickly generate much higher yields of particles, it is much more damaging to the nanostructures than ultrasonic fragmentation. The latter technique is particularly promising for silicon aerocrystals since processing times are reduced whilst yields are simultaneously raised with ultrahigh porosity structures. Not only that, but very high surface areas (> 500 m2/g) can be completely preserved with ultrasonic fragmentation.
A range of the distinctive physical properties, comprising high surface-to-volume ratio, mechanical and chemical stability, controlled quantum confinement and the room-temperature photoluminescence, combined with mass production capabilities offer porous silicon...
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