Thin films of vanadium dioxide have been formed by reactive sputtering of vanadium in an argon atmosphere doped with a partial pressure of oxygen. The films were deposited on sapphire substrates held at 400°C and exhibit a highly oriented polycrystalline monoclinic structure at room temperature. The semiconductor to metal transition is observed at 345°K with a slight hysteresis with temperature reversal.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.