This paper presents the experimental investigation of an optimal hot embossing process to prevent the nanoscale thermal deformation of microstructures replicated from the electroless Ni mold fabricated by the diamond tool-interfered scribing method. A polymer-based PMMA was replicated from the mold with the blazed profile: period 2.0 μm and depth 0.2 μm. The molding conditions, the applying pressure (P m ), molding temperature (T m ) and demolding temperature (T d ) were chosen as experiment parameters. In terms of the quality of surface smoothness, profile, sharp edge, surface roughness and optical performance of the replica, the conditions, P m = 0.9 MPa, T m = 150 • C and T d = 20 • C, showed a best results. From optical testing, diffraction efficiency of the replica was measured, 87.6%, and the replica molded in other conditions showed a noticeable efficiency drop due to the molding error.
This paper presents a noble diffractive grating so as to achieve high diffraction order. A v-shaped groove transmission grating with reflective and refractive surfaces (VGRRS) is proposed. Design, fabrication, and optical testing of the VGRRS are described. This grating is simulated by Rigorous coupled-Wave analysis (RCWA) for TE mode and fabricated by thermal evaporation on the replica which is obtained through a hot-embossing process using a v-shaped groove mold. The most important property of VGRRS is to conduct a high diffraction order at visible wavelengths. When used at the wavelength of 406 nm, the VGRRS can strongly have two high diffracted lights in terms of -4th and -10th transmission diffraction orders.
This paper presents the development of an integral optics system for a slim optical mouse whose operation principle in light propagation is based on total internal refection to prevent image distortion. The slim optical mouse can be applied to a portable electric device which has been becoming thinner and smaller and has a variety of functions for entertainment applications. The integral optics system was designed as a combination of an illumination system with a reflector and refractor, an object system, and a lens system with array multilevel lenses for a slim optical mouse with the thickness of 2.5 mm. Fabrications were performed on photo and EB lithography, thermal evaporation by shadowing effect, FAB etching, TMAH etching, and hot embossing. The results show that this system is quite appropriate for a slim optical mouse with the measuring image performance through the lens system and light efficiency traveling to the object plane through the illumination system.
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