A wireless vapor sensor based upon the quantum capacitance effect in graphene is demonstrated. The sensor consists of a metal-oxide-graphene variable capacitor (varactor) coupled to an inductor, creating a resonant oscillator circuit. The resonant frequency is found to shift in proportion to water vapor concentration for relative humidity (RH) values ranging from 1% to 97% with a linear frequency shift of 5.7 + 0.3 kHz / RH%. The capacitance values extracted from the wireless measurements agree with those determined from capacitancevoltage measurements, providing strong evidence that the sensing arises from the variable quantum capacitance in graphene. These results represent a new sensor transduction mechanism and pave the way for graphene quantum capacitance sensors to be studied for a wide range of chemical and biological sensing applications.
AlN/GaN heterostructures with a 3.5 nm AlN cap have been grown by molecular beam epitaxy followed by a 6 nm thick atomic layer deposited Ta2O5 film. Transistors fabricated with 150 nm length gates showed drain current density of 1.37 A/mm, transconductance of 315 mS/mm, and sustained drain-source biases up to 96 V while in the off-state before destructive breakdown as a result of the Ta2O5 gate insulator. Terman’s method has been modified for the multijunction capacitor and allowed the measurement of interface state density (∼1013 cm−2 eV−1). Small-signal frequency performance of 75 and 115 GHz was obtained for ft and fmax, respectively.
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