Abstract-When surface micromachined devices are combined with on-chip circuitry, any high-temperature processing must be avoided to minimize the effect on active device characteristics. High-temperature stress annealing cannot be applied to these structures. This work studies the effects of deposition parameters and subsequent processing on the mechanical properties of the polysilicon film in the development of a low-strain polysilicon process, without resorting to high-temperature annealing. The films are deposited as a semi-amorphous film and then annealed, in situ at 600°C for 1 h, to ensure the desired mechanical characteristics for both doped and undoped samples. This low temperature anneal changes the strain levels in undoped films from -250 to +1100 PE. The best results have been obtained for an 850°C anneal for 30 min which is used to activate the dopant (both phosphorus and boron). No further stress annealing was used, and 850°C does not present problems in terms of thermal budget for the electrical devices. It is shown that these mechanical characteristics are achieved by forming the grain boundaries during subsequent low temperature annealing, and not during deposition. TEM (transmission electron microscopy) studies have been used to investigate the link between the structure and mechanical strain. This has shown that it is the formation of the grain boundary rather than the grain size which has a significant effect on strain levels, contrary to reports in the literature. Using the above-mentioned deposition process, a series of experiments have been performed to establish the flexibility in subsequent processing available to the designer. Therefore, by careful consideration of the processing, a low-temperature polysilicon process, which can be used to fabricate thin micromachined structures, has been developed. [138] I. INTRODUCTTON OLYSILICON is a material frequently used for both P electronics and sensors. In the field of electronics it has been applied to polysilicon emitter bipolar [
This paper presents an efficient technique for trapping of magnetic particles in confined spatial locations using customized designs of micro-coils (MCs). Large magnetic field gradients of up to 20 T/mm and large magnetic forces in the range of 10 -8 Newton on magnetic particles with diameter of 1 lm have been achieved using MCs with several planar geometrical configurations. A large magnetic field gradient is generated and enhanced by two structural parameters: the small width and high aspect ratio of each single conductor and the ferromagnetic pillars positioned at high-flux density locations. This arrangement creates very steep magnetic potential wells, in particular at the vicinity of the pillars. The system allowed capturing of suspended magnetic particles as far as 1,000 lm from the center of the device. Magnetic particles/cells have been trapped and confined in single and in arrays of deep magnetic potential wells corresponding to the MCs configuration.
A novel microfluidic platform for manipulation of micro/nano magnetic particles was designed, fabricated and tested for applications dealing with biomolecular separation. Recently, magnetic immunomagnetic cell separation has attracted a noticeable attention due to the high selectivity of such separation methods. Strong magnetic field gradients can be developed along the entire wire, and the miniaturized size of these current-carrying conductors strongly enhances the magnetic field gradient and therefore produces large, tunable and localized magnetic forces that can be applied on magnetic particles and confine them in very small spots. Further increases in the values of the generated magnetic field gradients can be achieved by employing miniaturized ferromagnetic structures (pillars) which can be magnetized by an external magnetic field or by micro-coils on the same chip. In this study, we demonstrate magnetic beads trapping, concentration, transportation and sensing in a liquid sample under continuous flow by employing high magnetic field gradients generated by novel multi-functional magnetic micro-devices. Each individual magnetic micro-device consists of the following components: 1. Cu micro-coils array embedded in the silicon substrate with high aspect ratio conductors for efficient magnetic field generation 2. Magnetic pillar(s) made of the magnetic alloy NiCoP for magnetic field focusing and magnetic field gradient enhancement. Each pillar is magnetized by its corresponding coil 3. Integrated sensing coil for magnetic beads detection 4. Microfluidic chamber containing all the previous components. Magnetic fields of about 0.1 T and field gradients of around 300 T/cm have been achieved, which allowed to develop a magnetic force of 3 x 10(-9) N on a magnetic particle with radius of 1 mum. This force is large enough to trap/move this particle as the required force to affect such particles in a liquid sample is on the order of approximately pN. Trapping rates of up to 80% were achieved. Furthermore, different micro-coil designs were realized which allowed various movement modes and with different step-sizes. These results demonstrate that such devices incorporated within a microfluidic system can provide significantly improved spatial resolution and force magnitude for quick, efficient and highly selective magnetic trapping, separation and transportation, and as such they are an excellent solution for miniaturized mu-total analysis systems.
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