A macroporous silicon photonic crystal is designed and optimized theoretically for its use in gas sensing applications and IR optical filters. Light impinges perpendicularly onto the sample surface (vertical propagation) so a three-dimensional (3d) structure is used. For gas sensing, a sharp resonance is desired in order to isolate an absorption line of the gas of interest. The high Q-factors needed mandate the use of a plane defect inside the PhC to give rise to a resonant mode inside the bandgap tuned to the gas absorption line. Furthermore to allow gas passage through the device, an open membrane is required. This can affect the mechanical resilience. To improve the strength of the photonic crystal the pores are extended after the “active” 3d part. The number of modulations, and the extension length have been optimized to obtain the largest Q-factor with reasonable transmitted power. These proposed structures have been experimentally performed, probing an enhancement of almost an order of magnitude in the Q-factor in respect with the basic case. Simulations considering CO2 have been performed showing that the proposed structures are promising as precise optical gas sensors.Peer ReviewedPostprint (author's final draft
The reorganization through high-temperature annealing of closely-packed pore arrays can be exploited to create ultra-thin (<20 µm) monocrystalline silicon layers that can work as cheap and flexible substrates for both the electronic and the photovoltaic industries. By introducing a periodic diameter modulation along deep etched pores, many thin layers can be produced from a single substrate and in a single technological process. Besides the periodicity, the exact shape of the modulation also has a profound impact on the process and subtle profile changes can lead to important differences on the process outcome. In this paper we study both theoretically and experimentally the effect of the initial profile on the pore reorganization dynamics and the morphology of the thin layers obtained through annealing. We show that process reliability, annealing time and final layer characteristics, all can be engineered and optimized by precisely controlling the initial pore profile.
Large bandgaps with low transmission in 3D macroporous silicon photonic crystals have been proved as an interesting technology for the development of optical filters and spectroscopic MIR gas sensors. The aim of this study is the investigation of different bandgap widening methods based on multiperiodic structures for 3D macroporous silicon photonic crystals. To do so, chirped modulations and structures with different periodicity groups have been modelled and theoretically analysed by means of 3D FDTD simulations. They have revealed that by using different decreasing periodicity groups, bandgaps with null transmission and widths as high as 1800 nm, 4 times the original single periodicity photonic crystal bandgap, can be obtained. Furthermore, it has been shown that a resonant cavity with a 20% transmission can be placed in a 1 μm wide bandgap. The results open a way to use this type of structures not only for gas sensing but also for other purposes such as wide stop-band filters, selective filters or broadband mirrors.
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