Effect of fabrication tolerances in macroporous silicon photonic crystals

Segura, D.; Vega, Davide; Cardador, D.; Rodríguez, Ángel

doi:10.1016/j.sna.2017.07.011

Cited by 14 publications

(18 citation statements)

References 27 publications

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“…Some interesting conclusions extracted from this work are that ellipsoid perturbation up to AE10% has little impact on the PBG if the porosity is maintained near its optimum, and that a small variation of the air fraction of just AE4% is enough to shift a narrow PBG (Δf ¼ 5%) out of the designed central gap frequency f 0 . Similar conclusion was found in the work by our group [57], where the effect of vertical period variation in 3-d MPS was analysed. Wide PBGs were designed for the samples used in this work, but noticeable narrowing and shift could be observed with periodicity variations above AE5%.…”

Section: Absorption and Losses Of Macroporous Siliconsupporting

confidence: 89%

“…The most significant defect found in the samples here used was vertical period variation 13 .As seen from Figure 5, for neighbouring pores, the beginning and ending of each vertical period is slightly different. As shown in our previous work [57], this variation has a noticeable influence on the PC optical response. In general, the 700 nm samples fabricated with our equipment show about 5% variation in periodicity which results in about 30% PBG narrowing from the ideal and nearly 10% minimum transmittance [57] 14 .…”

Section: Morphological Analysissupporting

confidence: 66%

“…As shown in our previous work [57], this variation has a noticeable influence on the PC optical response. In general, the 700 nm samples fabricated with our equipment show about 5% variation in periodicity which results in about 30% PBG narrowing from the ideal and nearly 10% minimum transmittance [57] 14 .…”

Section: Morphological Analysissupporting

confidence: 66%

“…Pore radius variation is small-less than 10%-for the samples used here. This has a small impact on the optical response of the PC as has demonstrated by our works [57] and others [58,59]. Skew is generally not an issue.…”

Section: Morphological Analysissupporting

confidence: 65%

See 3 more Smart Citations

Macroporous Silicon for Gas Detection

Vega¹,

Rodríguez²

2018

Applications of Silicon Photonics in Sensors and Waveguides

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Macroporous silicon (MPS) has been shown to be a promising material in many areas of technical interest. In particular, MPS has been applied for electronic devices and microfluidic applications. One of the most promising features of MPS is that it enables the development of optical applications using simple and cost-effective technology, compatible with MEMS fabrication processes and suitable for mass production. This chapter describes the application of MPS structures fabricated using electrochemical etching (EE) for the detection of gases of environmental concern in the wavelength range comprising 4 μmt o1 5μm, such as CO 2. Vertical-modulated MPS structures are reported, whose photonic bandgaps can be placed at different wavelengths depending on the application needs. These structures have been applied to the quantification of CO 2 , and these results are summarised here. Detection is performed by the direct measure of absorption, obtaining promising results with short optical paths.

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Section: Absorption and Losses Of Macroporous Siliconsupporting

confidence: 89%

Section: Morphological Analysissupporting

confidence: 66%

Section: Morphological Analysissupporting

confidence: 66%

Section: Morphological Analysissupporting

confidence: 65%

See 2 more Smart Citations

Macroporous Silicon for Gas Detection

Vega¹,

Rodríguez²

2018

Applications of Silicon Photonics in Sensors and Waveguides

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“…Then, more groups with different periodicities increase the averaging, reducing the effect of the individual interference patterns that can be seen in a group with a single periodicity. This effect has also been reported in macroporous silicon PhCs for statistical deviations of the period due to fabrication tolerances [24].…”

Section: Resultssupporting

confidence: 68%

Bandgap widening in macroporous silicon photonic crystals by multiperiodic structures

et al. 2018

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Large bandgaps with low transmission in 3D macroporous silicon photonic crystals have been proved as an interesting technology for the development of optical filters and spectroscopic MIR gas sensors. The aim of this study is the investigation of different bandgap widening methods based on multiperiodic structures for 3D macroporous silicon photonic crystals. To do so, chirped modulations and structures with different periodicity groups have been modelled and theoretically analysed by means of 3D FDTD simulations. They have revealed that by using different decreasing periodicity groups, bandgaps with null transmission and widths as high as 1800 nm, 4 times the original single periodicity photonic crystal bandgap, can be obtained. Furthermore, it has been shown that a resonant cavity with a 20% transmission can be placed in a 1 μm wide bandgap. The results open a way to use this type of structures not only for gas sensing but also for other purposes such as wide stop-band filters, selective filters or broadband mirrors.

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Simultaneous occurrence and compensating effects of multi‐type disorder in two‐dimensional photonic structures

et al. 2023

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Finite‐difference time‐domain (FDTD) simulations of the transmission spectra of planar small‐footprint photonic components with up to four types of morphological disorder as a materials parameter are performed with the aim to identify the individual contributions of the type of disorder to the spectral features. We concentrate on optical components that have a small footprint, that is, their extensions in two dimensions are roughly one order of magnitude higher than the wavelength. They are modeled by a regular pattern of cylinders in a 7 × 10 square lattice, modified by the introduction of a disorder parameter varying either presence, radius, position, distance, or dielectric properties of the cylinders and the surrounding medium. Although the observation that an increasing amount of disorder results in a decreasing transmission intensity of an optical component is well known, quantitative studies of the particular spectral changes and a clear correlation especially with multiple types and amounts of disorder are rare. From these findings, we propose a model component that can incur a compensation of disorder‐induced spectral effects of geometric type with such effects of dielectric type. Our work shows that several types of disorder as well as the mixing two types of disorder can be used for an intentional adaptation of the spectral transmission characteristics and may be considered in the design of small‐footprint photonic components such as scatterers, diffusers, and waveguides.

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Effect of fabrication tolerances in macroporous silicon photonic crystals

Cited by 14 publications

References 27 publications

Macroporous Silicon for Gas Detection

Macroporous Silicon for Gas Detection

Bandgap widening in macroporous silicon photonic crystals by multiperiodic structures

Simultaneous occurrence and compensating effects of multi‐type disorder in two‐dimensional photonic structures

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