The formation chemistry and growth dynamics of thin-film CuInSe2 grown by physical vapor deposition have been considered along the reaction path leading from the CuxSe:CuInSe2 two-phase region to single-phase CuInSe2. The (Cu2Se)β(CuInSe2)1−β (0<β≤1) mixed-phase precursor is created in a manner consistent with a liquid-phase assisted growth process. At substrate temperatures above 500 °C and in the presence of excess Se, the film structure is columnar through the film thickness with column diameters in the range of 2.0–5.0 μm. Films deposited on glass are described as highly oriented with nearly exclusive (112) crystalline orientation. CuInSe2:CuxSe phase separation is identified and occurs primarily normal to the substrate plane at free surfaces. Single-phase CuInSe2 is created by the conversion of the CuxSe into CuInSe2 upon exposure to In and Se activity. Noninterrupted columnar growth continues at substrate temperatures above 500 °C. The addition of In in excess of that required for conversion produces an In-rich near-surface region with a CuIn3Se5 surface chemistry. A model is developed that describes the growth process. The model provides a vision for the production of thin-film CuInSe2 in industrial scale systems. Photovoltaic devices incorporating Ga with total-area efficiencies of 14.4%–16.4% have been produced by this process and variations on this process.
The absorption coefficient (α) and fundamental transition energies of thin-film CuInSe2 were determined by spectrophotometry in the near-infrared (NIR) and visible wavelength regions from 500 to 2000 nm for a wide range of compositions. The results suggest a relationship between the constituent specie fluxes and substrate temperature, and the resulting polycrystalline nature of the film which dominates the optical properties. Near-stoichiometric and Cu-rich films appear to crystallize in larger grain sizes in comparison with Cu-poor films, with a Cu2−δ Se secondary phase at grain boundaries and free surfaces. Correspondingly, significant variations in the absorption coefficient among different film compositions exist in the neighborhood of the band edge. At energies well above the gap, all films behave similarly with α’s of (1–2)×105 cm−1 at 500 nm. Similarly, continuous dispersion curves for the index of refraction have only been derived for single phase Cu-poor material by an iterative technique. The absorption data are substantiated through spectral response simulations that accurately reproduce measured device data. The range of primary and secondary transition energies, respectively, is 0.95–1.01 and 1.17–1.22 eV. These values indicate a valence-band splitting of 0.20–0.24 eV, in good agreement with single-crystal values.
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